journal article·1998-07

Current density and line width effects in electromigration: a new damage-based lifetime model

O. Kraft, E. Arzt

Acta Materialia· Volume 46· Issue 11
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Corrosion Behavior and Inhibition

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (53)

Show source-provided references
1. Blech, I. A. and Sello, H., in Physics of Failures in Electronics, Rome Air Development Center, 1966, Vol. 5, p. 49610.1109/IRPS.1966.362381 ↗
2. Black · IEEE Tr. E.D. · 1969 · ED 16 · 33810.1109/T-ED.1969.16754 ↗
3. Thompson · MRS Bulletin · 1993 · 18 · 1910.1557/S088376940003904X ↗
4. Cho · Appl. Phys. Lett. · 1989 · 54 · 257710.1063/1.101054 ↗
5. Dreyer · Appl. Phys. Lett. · 1992 · 60 · 1510.1063/1.107161 ↗
6. Arzt · J. Mat. Res. · 1991 · 6 · 73110.1557/JMR.1991.0731 ↗
7. Kirchheim · J. Appl. Phys. · 1991 · 70 · 17210.1063/1.350305 ↗
8. Korhonen · J. Appl. Phys. · 1993 · 74 · 499510.1063/1.354305 ↗
9. Joo · J. Appl. Phys. · 1994 · 76 · 733910.1063/1.357979 ↗
10. Nikawa, K., in 19th Int. Reliability Physics Symp., IEEE, New York, NY, 1981, p. 17510.1109/IRPS.1981.362992 ↗
11. Sanchez · J. Electronic Materials · 1990 · 19 · 121310.1007/BF02673335 ↗
12. Sanchez · J. Appl. Phys. · 1992 · 72 · 320110.1063/1.351484 ↗
13. Sanchez · Appl. Phys. Lett. · 1992 · 61 · 312110.1063/1.107980 ↗
14. Rose · Appl. Phys. Lett. · 1992 · 61 · 217010.1063/1.108284 ↗
15. Rose, J. H. and Spooner, T., in Materials Reliability in Microelectronics III. MRS Symp. Proc. Vol. 309, Pittsburgh, PA, 1993, p. 40910.1557/PROC-309-409 ↗
16. Joo, Y.-C. and Thompson, C. V., in Materials Reliability in Microelectronics III. MRS Symp. Proc. Vol. 309, Pittsburgh, PA, 1993, p. 35110.1557/PROC-309-383 ↗
17. Shih, W. C., Denton, T. C. and Greer, A. L., in Materials Issues in Microelectronics Reliability II. MRS Symp. Proc. Vol. 265, Pittsburgh, PA, 1992, p. 10110.1557/PROC-265-101 ↗
18. Hinode · J. Appl. Phys. · 1993 · 74 · 20110.1063/1.354138 ↗
19. Kraft, O., Bader, S., Sanchez, J. E. Jr. and Arzt, E., in Materials Reliability in Microelectronics III. MRS Symp. Proc. Vol. 309, Pittsburgh, PA, 1993, p. 19910.1557/PROC-309-199 ↗
20. Marieb, T., Bravman, J. C., Flinn, P. and Madden, M., in Materials Reliability in Microelectronics IV. MRS Symp. Proc. Vol. 338, Pittsburgh, PA, 1994, p. 40910.1557/PROC-338-409 ↗
21. Marieb · J. Appl. Phys. · 1995 · 78 · 102610.1063/1.360404 ↗
22. Kraft · Acta mater. · 1997 · 45 · 159910.1016/S1359-6454(96)00231-5 ↗
23. Shatzkes · J. Appl. Phys. · 1986 · 59 · 389010.1063/1.336731 ↗
24. Nix · Met. Trans. A · 1992 · 23A · 200710.1007/BF02647548 ↗
25. Attardo · J. Appl. Phys. · 1971 · 42 · 434310.1063/1.1659778 ↗
26. Børgesen, P., Korhonen, M. A., Sullivan, T. D., Brown, D. D. and Li, C-Y., in Thin Films: Stresses and Mechanical Properties III. MRS Symp. Proc. Vol. 239, Pittsburgh, PA, 1991, p. 68310.1557/PROC-239-683 ↗
27. Arzt · J. Appl. Phys. · 1994 · 76 · 156310.1063/1.357734 ↗
28. Kraft, O., Sanchez, J. E. Jr., Bauer, M. and Arzt, E., J. Mat. Res., 1997, 12, 202710.1557/JMR.1997.0272 ↗
29. Blech · J. Appl. Phys. · 1976 · 47 · 120310.1063/1.322842 ↗
30. Blech · Appl. Phys. Lett. · 1976 · 29 · 13110.1063/1.89024 ↗
31. Besser, P. R., Bader, S., Venkatraman, R. and Bravman, J. C., in Thin Films: Stresses and Mechanical Properties IV. MRS Symp. Proc. Vol. 309, Pittsburgh, PA, 1993, p. 25510.1557/PROC-309-255 ↗
32. Bader · J. Mater. Res. · 1994 · 9 · 31810.1557/JMR.1994.0318 ↗
33. Kuschke · Appl. Phys. Lett. · 1994 · 64 · 109710.1063/1.110944 ↗
34. Thompson · IEEE E. D. Lett. · 1986 · 7 · 66710.1109/EDL.1986.26513 ↗
35. Atakov, E. M., Clement, J. J. and Miner, B., in Materials Reliability in Microelectronics III. MRS Symp. Proc. Vol. 309, Pittsburgh, PA, 1993, p. 13310.1557/PROC-309-133 ↗
36. Kinsbron · Appl. Phys. Lett. · 1980 · 36 · 96810.1063/1.91385 ↗
37. Vaidya · Appl. Phys. Lett. · 1980 · 36 · 46410.1063/1.91508 ↗
38. Scorzoni, A., Neri, B., Caprile, C. and Fantini, F., Mat. Sci. Reports. 1991, 7, 14310.1016/0920-2307(91)90005-8 ↗
39. Arzt, E., Kraft, O. and Möckl, U. E., in Materials Reliability in Microelectronics IV. MRS Symp. Proc. Vol. 338, Pittsburgh, PA, 1994, p. 39710.1557/PROC-338-397 ↗
40. Sanchez, J. E. Jr., Ph.D. thesis, University of California, Berkeley, CA, USA, 1991
41. Kraft, O., Ph.D. thesis, Inst. für Metallkunde, Universität Stuttgart, Germany, 1995
42. Bauer, M., Diploma thesis, Inst. für Metallkunde, Universität Stuttgart, Germany, 1993
43. Möckl, U. E., Bauer, M., Kraft, O., Sanchez, J. E. and Arzt, E., in Materials Reliability in Microelectronics IV. MRS Symp. Proc. Vol. 338, Pittsburgh, PA, 1994, p. 37310.1557/PROC-338-373 ↗
44. Gust · J. Physique · 1985 · 46 · 537
45. Gleixner, R. and Nix, W. D., in Materials Reliability in Microelectronics VI. MRS Symp. Proc. Vol., Pittsburgh, PA, 1996, p. 475
46. Rosenberg · J. Vac. Sci. Tech. · 1972 · 9 · 26310.1116/1.1316576 ↗
47. Augur, R. A., van den Elshout and Wolters R. A. M., in 3rd Int. Workshop on Stress-Induced Phenomena in Metallization. AIP Conf. Proc. Vol. 373. 1996, p. 27910.1063/1.50934 ↗
48. Longworth · Appl.Phys. Lett. · 1992 · 60 · 221910.1063/1.107035 ↗
49. Longworth, H. P. and Thompson, C. V., in Materials Reliability in Microelectronics II. MRS Symp. Proc. Vol. 265, Pittsburgh, PA, 1992, p. 9510.1557/PROC-265-95 ↗
50. Kraft · Quality and Reliability Engineering International · 1995 · 11 · 27910.1002/qre.4680110412 ↗
51. Thompson · Journal of Electronics Materials · 1993 · 22 · 58110.1007/BF02666402 ↗
52. Bader · Thin Solid Films · 1995 · 263 · 17510.1016/0040-6090(95)06556-3 ↗
53. Gardner, D. S. and Flinn, P. A., in Thin Films: Stresses and Mechanical Properties. MRS Symp. Proc. Vol. 130, Pittsburgh, PA, 1988, p. 6910.1557/PROC-130-69 ↗