Cross-sectional electron microscopy observation on the amorphized indentation region in [001] single-crystal silicon
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (17)
Show source-provided references
1. Clarke · Phys. Rev. Lett. · 1988 · 60 · 215610.1103/PhysRevLett.60.2156 ↗
2. Page · J. Mater. Res. · 1992 · 7 · 45010.1557/JMR.1992.0450 ↗
3. Callahan · J. Mater. Res. · 1992 · 7 · 161410.1557/JMR.1992.1614 ↗
4. Susuki · Phil. Mag. A · 1996 · 74 · 107310.1080/01418619608239708 ↗
5. Minowa · Phys. Rev. Lett. · 1992 · 69 · 32010.1103/PhysRevLett.69.320 ↗
6. Imai, M., Mitamura, T., Yaoita, K. and Tsuji, K., in Proc. of the Fourth Int. Conf. on High Pressure in Semiconductor Physics, ed. D.S. Kyriakos and O.E. Valassiades (Chalkidiki, Dorto Carvas), 1990, p. 188
7. Shen · J. Mater. Res. · 1995 · 10 · 13910.1557/JMR.1995.0139 ↗
8. Wu · J. Mater. Res. · 1999 · 14 · 68210.1557/JMR.1999.0093 ↗
9. Wu · J. Mater. Res. · 1999 · 14 · in press
10. Gridneva · Physica status solidi (a) · 1972 · 14 · 17710.1002/pssa.2210140121 ↗
11. Gerk · Nature · 1978 · 271 · 73210.1038/271732a0 ↗
12. Giannakopoulos · Int. J. Solids Struct. · 1994 · 31 · 267910.1016/0020-7683(94)90225-9 ↗
13. Jamieson · Science · 1963 · 139 · 76210.1126/science.139.3556.762 ↗
14. Hu · Phys. Rev. · 1986 · 34B · 467910.1103/PhysRevB.34.4679 ↗
15. Gupta · J. appl. Phys. · 1980 · 51 · 107210.1063/1.327714 ↗
16. Palvov · Physics Metals Metallogr. · 1985 · 59 · 1
17. Shimomura · Phil. Mag. A · 1974 · 29 · 54710.1080/14786437408213238 ↗