journal article·2011-07

Effect of pulse Nd-YAG laser beam interaction on annealing of nanopowder ITO using spin-on-glass

H. Salar Amoli, B. Fathi

Publisher page

Abstract

The effect of pulse Nd-YAG laser on structural and electrical properties of ITO thin film on glass by spin coating process was evaluated. It was found that the beam interaction of pulse laser energy has a significant effect on crystallization, conductivity and optical properties of ITO. Laser irradiation with a wavelength of 1,064 nm and energy of 8–40 J are employed. The conventional X-Ray diffraction studies show the peak intensities of (211), (222), and (440) planes increased by using Nd-YAG laser treatment and prove the crystallization of ITO nanoparticle. Due to absorption of millisecond pulse laser, the resistivity of ITO coating on glass substrate which was annealed at 350 °C, reduced by a factor of 100, and a resistance of less than 0.6 kΩ has been achieved.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Surface Roughness and Optical Measurements · ZnO doping and properties · Advanced Sensor Technologies Research

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (19)

Show source-provided references
1. Goebbert C, Bisht H, Al-Dahoudi N, Nonninger R, Aegerter MA, Schmidt H (2000) J. Sol–Gel Sci and Technol 19:20110.1023/A:1008728103512 ↗
2. Tak Y-H, Kim K-B, Park H-G, Lee K-H, Lee J-R (2002) Thin Solid Films 411:1210.1016/S0040-6090(02)00165-7 ↗
3. Lee H-C, Park OO (2006) Vacuum 80:88010.1016/j.vacuum.2005.11.069 ↗
4. AL-Dahoudi N, Aegerter MA (2003) J. Sol–Gel Sci Technol 26:69310.1023/A:1020777500940 ↗
5. Hau SK, Yip HL, Zoa J, Jen AK-Y (2009) Org Electron 10:140110.1016/j.orgel.2009.06.019 ↗
6. Young S-C, Yi G-R, Hong G-G, Jang SH, Yang S-M (2006) Thin Solid Films 515:186410.1016/j.tsf.2006.07.022 ↗
7. Toki M, Aizawa M (1997) J. Sol–Gel Sci Technol 8:717
8. kqacar E, Mutlu M, Akman E, Demir A, Candan L, Canel T (2009) J Material Proc Technol 209:200810.1016/j.jmatprotec.2008.04.049 ↗
9. Perhavec T, Gorkic A, Bracum D (2009) J Diaci Opt Laser Tech 41:39710.1016/j.optlastec.2008.08.007 ↗
10. Kem J (2007) Opt Laser Eng 45:89010.1016/j.optlaseng.2007.01.010 ↗
11. Vinodkumar R, Lethy KJ, Beena D, Satyanarayana M, Jayasree RS, Ganesan V, Nayar VU, Mahadevan Pillai VP (2009) Sol Energy Mater Sol Cells 93:7410.1016/j.solmat.2008.04.014 ↗
12. Cao X, Wallace W, Immarigeon JP, Poon C (2003) Mat Manuf Process 18(1):2310.1081/AMP-120017587 ↗
13. Chen M-F, Lin K-M, Ho Yu-S (2011) Mater Sci Eng B 176(2):12710.1016/j.mseb.2010.10.011 ↗
14. Stoev MD, Touskova J, Tousek J (1997) Thin Solid Films 299:6710.1016/S0040-6090(96)09085-2 ↗
15. Lindbery H, Strassner M, Gerster E, Bengtsson J (2005) IEEE J Quantum Electron 11(5):112610.1109/JSTQE.2005.853730 ↗
16. Stewen C, Contag K, Larionov M, Glesen A, Hugel H (2000) IEEE J Quantum Electron 6:65010.1109/2944.883380 ↗
17. Qiao Z, Latz R, Mergei D (2004) Thin Solid Films 466:25010.1016/j.tsf.2004.02.094 ↗
18. Mergel D, Qiao Z (2004) J Appl Phys 95:560810.1063/1.1704852 ↗
19. Mattox DM (1991) Thin Solid Films 204:2510.1016/0040-6090(91)90491-F ↗