Preparation and Characterization of Sol-Gel Derived Y2O3 Thin Films

journal article·1998-01

G. Teowee, K.C. McCarthy, F.S. McCarthy, T.J. Bukowski, D.G. Davis, D.R. Uhlmann

Bibliographic record

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Anodic Oxide Films and Nanostructures

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Show source-provided references

1. A.C. Rastogi and R.N. Sharma, J. Appl. Phys. 71, 5041 (1992).10.1063/1.350605 ↗

2. A.F. Andreeva, A. Sisonyuk, and E. Himich, Phys. Stat. Sol. A145, 441 (1994).10.1002/pssa.2211450226 ↗

3. S.L. Jones, D. Kumar, R.K. Singh, and P.H. Holloway, Appl. Phys. Lett. 71, 404 (1997).10.1063/1.119551 ↗

4. M. Berkowski, P. Bowen, T. Liechti, and H.J. Scheel, J. Am. Ceram. Soc. 75, 1005 (1992).10.1111/j.1151-2916.1992.tb04175.x ↗

5. R.P. Rao, Sol. State Comm. 99, 439 (1996).10.1016/0038-1098(96)00249-9 ↗

6. W.M. Cranton, D. Spink, R. Stevens, and C. Thomas, Thin Solid Films 226, 156 (1993).10.1016/0040-6090(93)90222-B ↗

7. Ken-ichi Onisawa, M. Fuyama, K. Tamura, K. Taguchi, T. Nakayama, and Y. Ono, J. Appl. Phys. 68, 719 (1990).10.1063/1.346804 ↗

8. J. Hudner, H. Ohlsen, and E. Fredriksson, Vacuum 45, 967 (1995).10.1016/0042-207X(95)00084-4 ↗

9. M.R. De Guire, H. Shin, R. Collins, M. Agarwal, C.N. Sukenik, and A.H. Heuer, Proc. SPIE 2686, 33 (1989).

10. S. Kuriki, A. Noya, and G. Matsumoto, Thin Solid Films 48, 27 (1978).10.1016/0040-6090(78)90328-0 ↗

11. R.M. Goldstein, Electronic Components Conference, 141 (1968).

12. J.P. Senateur, A. Abrutis, F. Felten, F. Weiss, O. Thomas, and R. Madar, Advances in Inorganic Films and Coatings, 161 (1995).

13. M. Pulver and G. Wahl, Advances in Inorganic Films and Coatings, 167 (1995).

14. C.K. Campbell and M. Thewalt, Thin Solid Films 13, 195 (1972).10.1016/0040-6090(72)90174-5 ↗

15. C.K. Campbell, Thin Solid Films 6, 197 (1970).10.1016/0040-6090(70)90039-8 ↗

16. T. Tsutsumi, Jpn. J. Appl. Phys. 9, 735 (1970).10.1143/JJAP.9.735 ↗

17. P. Meena, C. Balasubramanian, S. Narayandass, and D. Mangalaraj, Phys. Stat. Sol. A125, K97 (1991).10.1002/pssa.2211250243 ↗

18. M. Sayer and S. Martin, Thin Solid Films 6, R61 (1970).10.1016/0040-6090(70)90091-X ↗

19. C.R. Dutta and K. Barua, Thin Solid Films 100, 149 (1983).10.1016/0040-6090(83)90470-4 ↗

20. V.S. Dharmadhikari and A. Goswami, Thin Solid Films 87, 119 (1982).10.1016/0040-6090(82)90266-8 ↗

21. T. Wiktorczyk and C. Wesolowska, Thin Solid Films 71, 15 (1980).10.1016/0040-6090(80)90178-9 ↗

22. M.K. Jayaraj and C.P.G. Vallabhan, Thin Solid Films 40, 16 (1991).

23. A. Goswami and R.R. Varma, Thin Solid Films 28, 157 (1975).10.1016/0040-6090(75)90106-6 ↗