journal article·2018-07

Phase-field modeling of grain-boundary grooving and migration under electric current and thermal gradient

Supriyo Chakraborty, Praveen Kumar, Abhik Choudhury

Acta Materialia· Volume 153
Publisher page

Abstract

Abstract Grain-boundary migration, void formation as well as associated hillock formation are important mechanisms which lead to the failure of interconnects in the microelectronic packages. An understanding of the underlying physics of each of the phenomena can allow better design of interconnects. In this paper, we formulate a new phase-field model based on a grand-potential formalism for studying the phenomena of grain-boundary grooving under the combined influence of pure diffusion controlled transport, electric current and thermal gradient. We separately investigate the contributions of each of the stimuli towards the process of grain-boundary migration and hillock formation, by performing phase-field simulations as well as comparing with analytical theories. Additionally, we qualitatively reproduce the phenomena observed in experiments on polycrystalline metals, wherein electromigration and thermomigration may act in unison or against each other towards their contributions in grooving, hillocking and void growth.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Solidification and crystal growth phenomena · Aluminum Alloy Microstructure Properties · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (33)

Show source-provided references
1. Current-induced marker motion in gold wires10.1016/0022-3697(61)90138-X ↗
2. Electromigration-a brief survey and some recent results10.1109/T-ED.1969.16754 ↗
3. Electromigration in thin aluminium films on titanium nitride10.1063/1.322842 ↗
4. Recent advances on electromigration in very large-scale integration of interconnects10.1063/1.1611263 ↗
5. Electromigration in electroplated cu(ag) alloy thin films investigated by means of single damascene blech structures10.1016/j.mee.2009.04.028 ↗
6. Thermomigration in pb–sn solder joints under joule heating during electric current stressing10.1063/1.1554775 ↗
7. Thermomigration in solid metals10.1016/0022-3697(69)90315-1 ↗
8. Thermomigration in snpb composite flip chip solder joints10.1063/1.2192694 ↗
9. Thermomigration of carbon in metals10.1007/BF02917541 ↗
10. Electric current induced forward and anomalous backward mass transport10.1088/0022-3727/49/20/20LT01 ↗
11. Electromigration and thermomigration of metallic islands on the si (100) surface
12. Influence of microstructure on electromigration dynamics in submicron al interconnects: real-time imaging10.1063/1.117527 ↗
13. Effect of the crystallinity on the electromigration resistance of electroplated copper thin-film interconnections10.1115/1.4036442 ↗
14. Grain boundary grooving in thin films revisited: the role of interface diffusion10.1016/j.actamat.2014.02.008 ↗
15. A finite element analysis of the motion and evolution of voids due to strain and electromigration induced surface diffusion10.1016/S0022-5096(97)00013-6 ↗
16. Analysis of failure mechanisms in the interconnect lines of microelectronic circuits10.1046/j.1460-2695.1998.00057.x ↗
17. Simulations and theory of electromigration-induced slit formation in unpassivated single-crystal metal lines10.1103/PhysRevB.59.11037 ↗
18. Free energy of a nonuniform system. i. interfacial free energy10.1063/1.1744102 ↗
19. Diffuse interface model for electromigration and stress voiding10.1063/1.372082 ↗
20. A phase field model for failure in interconnect lines due to coupled diffusion mechanisms10.1016/S0022-5096(02)00019-4 ↗
21. Phase-field modeling of grain-boundary grooving under electromigration10.1007/s11664-016-4848-z ↗
22. Electromigration damage in thin films due to grain boundary grooving processes10.1063/1.1660603 ↗
23. Grain boundary grooving and cathode voiding in bamboo-like metallic interconnects by surface drift diffusion under the capillary and electromigration forces10.1063/1.1883305 ↗
24. Grain boundary grooving induced by the anisotropic surface drift diffusion driven by the capillary and electromigration forces: Simulations10.1063/1.3624733 ↗
25. Diffusion under temperature gradient: a phase-field model study10.1063/1.3190607 ↗
26. Phase-field modeling of temperature gradient driven pore migration coupling with thermal conduction10.1016/j.commatsci.2012.01.002 ↗
27. Grand-potential formulation for multicomponent phase transformations combined with thin-interface asymptotics of the double-obstacle potential10.1103/PhysRevE.85.021602 ↗
28. A diffuse interface model for alloys with multiple components and phases10.1137/S0036139902413143 ↗
29. Theory of thermal grooving10.1063/1.1722742 ↗
30. The effect of thermal grooving on grain boundary motion10.1016/0001-6160(58)90020-8 ↗
31. Solute effects grain boundary electromigration and diffusion10.1007/978-1-4757-0181-4_14 ↗
32. C. K. Hu, M. Angyal, B. C. Baker, G. Bonilla, C. Cabral, D. F. Canaperi, S. Choi, L. Clevenger, D. Edelstein, L. Gignac, E. Huang, J. Kelly, B. Y. Kim, V. KyeiFordjour, S. L. Manikonda, J. Maniscalco, S. Mittal, T. Nogami, C. Parks, R. Rosenberg, A. Simon, Y. Xu, T. A. Vo, C. Witt, Effect of impurity on cu electromigration, AIP Conference Proceedings 57.
33. Grain-size dependence of electromigration induced failures in narrow interconnects10.1063/1.101054 ↗