The effect of thickness on the steady-state creep properties of freestanding aluminum nano-films

Abstract To clarify the effects of film thickness on the creep properties of nano-films we conducted tensile creep experiments on freestanding aluminum films with thickness values in the range ∼100–800 nm at room temperature. The nano-films showed typical creep behavior comprising transient, steady-state, and accelerated creep stages. The steady-state creep exponents of the 100–800 nm thick specimens were 0.84–2.7 in the stress range 30–120 MPa, which are close to the value for diffusion creep (1). Creep deformation clearly shows a thickness effect: the steady-state creep rate increases as the thickness decreases from 800 to 400 nm, shows a peak in the range 400–200 nm, and then decreases in the 200–100 nm thickness range. The creep experiments under a small stress of 1 MPa show a negative strain rate, indicating the presence of a driving force to reduce the surface area due to surface tension. The explanation for the thickness effect is as follows. Since the ratio of surface and grain boundary area to volume increases with decreasing thickness, diffusion creep along these paths is enhanced, resulting in an increase in the creep rate. As the thickness decreases to 200–100 nm, however, the surface tension effect to reduce the surface area becomes dominant, decreasing the creep rate. In addition, the creep rate of the nano-films is about two or three orders of magnitude smaller than that of the bulk material dominated by the dislocation creep mechanism.