journal article·2011-12Open access

Diffusion kinetics in aluminium–gold bond contacts from first-principles density functional calculations

Christian M. Ulrich, Adham Hashibon, Jiřı´ Svoboda, Christian Elsässer, Dirk Helm, Hermann Riedel

Acta Materialia· Volume 59· Issue 20

Abstract

A common joining method in microelectronics is thermosonic bonding of gold wires to aluminium pads deposited on the integrated circuit. In the interface between the wire and the pad a number of intermetallic compounds AlxAuy can develop, which significantly affect the mechanical properties and corrosion resistance of the bonds. Based on Onsager’s extremal principle of irreversible thermodynamics, the present paper describes the evolution of the intermetallic phases. This macroscopic model contains several thermodynamic and kinetic parameters, some of which are not available from databases. As an alternative to often cumbersome experiments, density functional theory is applied to calculate the formation energies of the phases and of atomic vacancies, as well as the vacancy migration energies in AlAu4. To derive tracer diffusion coefficients from the atomistic vacancy jump rates, one must take peculiarities of the AlAu4 lattice into account: the vacancy migration energy between certain gold sites is found to be rather low, but these low-energy jumps are arranged in closed triangles and, therefore, do not provide paths for long-range diffusion of gold atoms. However, together with two other types of jumps with still moderate migration energies, a contiguous network of diffusion paths for gold becomes possible. Since the diffusion of aluminium in AlAu4 requires the generation of high- energy anti-site defects (at least temporarily), aluminium is expected to move very slowly, but no final solution is provided.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Intermetallics and Advanced Alloy Properties · Electronic Packaging and Soldering Technologies · Semiconductor materials and interfaces

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (66)

Show source-provided references
1. Adam J, et al. International technology roadmap for semiconductors – assembly and packaging; 2009. .
2. Karpel · J Mater Sci · 2007 · 42 · 233410.1007/s10853-007-1592-z ↗
3. Philofsky E. Reliab Phys Symp 1971;120–8 [9th Annual].10.1109/IRPS.1971.362503 ↗
4. Philofsky · Solid-State Electron · 1970 · 13 · 139110.1016/0038-1101(70)90172-3 ↗
5. Breach · Microelectron Reliab · 2010 · 50 · 110.1016/j.microrel.2009.08.003 ↗
6. Karpel · J Mater Sci · 2007 · 42 · 234710.1007/s10853-007-1593-y ↗
7. Malone · Crit Rev Solid State Mater Sci · 1997 · 22 · 19910.1080/10408439708241261 ↗
8. Mishin · Mater Sci Eng A · 1999 · 260 · 5510.1016/S0921-5093(98)00978-2 ↗
9. Smigelskas · Trans AIME · 1947 · 171 · 130
10. Klengel · 2006 · 370
11. Müller · 2006 · Vol. 2 · 1266
12. Murray · Bull Alloy Phase Diagr · 1987 · 8 · 2010.1007/BF02868887 ↗
13. Blech · J Electrochem Soc · 1966 · 113 · 1052
14. Hanai · J Jpn Inst Met · 1996 · 60 · 3710.2320/jinstmet1952.60.1_37 ↗
15. Majni · J Cryst Growth · 1979 · 47 · 58310.1016/0022-0248(79)90143-X ↗
16. Majni · J Appl Phys · 1981 · 52 · 404710.1063/1.329214 ↗
17. Weaver · Philos Mag · 1962 · 7 · 110.1080/14786436208201853 ↗
18. Weaver · Philos Mag · 1970 · 22 · 37710.1080/14786437008228230 ↗
19. Breach · J Mater Sci · 2004 · 39 · 612510.1023/B:JMSC.0000041716.58658.0a ↗
20. Breach · Gold Bull · 2009 · 42 · 9210.1007/BF03214919 ↗
21. Zhang · Acta Mater · 2008 · 56 · 394010.1016/j.actamat.2008.04.017 ↗
22. Svoboda · Philos Mag · 2005 · 85 · 369910.1080/14786430500267760 ↗
23. Svoboda · J Phase Equilib Diffus · 2006 · 27 · 62210.1007/BF02736564 ↗
24. Straumanis · Z Phys Chem · 1964 · 42 · 34410.1524/zpch.1964.42.5_6.344 ↗
25. Frank · J Less–Common Met · 1970 · 22 · 34910.1016/0022-5088(70)90085-8 ↗
26. Pušelj · J Less–Common Met · 1974 · 35 · 25910.1016/0022-5088(74)90236-7 ↗
27. Range · J Less–Common Met · 1989 · 154 · 25110.1016/0022-5088(89)90211-7 ↗
28. Büchler · J Less–Common Met · 1990 · 161 · 34710.1016/0022-5088(90)90047-N ↗
29. Iijima · Mater Trans JIM · 1989 · 30 · 48010.2320/matertrans1989.30.480 ↗
30. Onsager · Ann NY Acad Sci · 1945 · 46 · 24110.1111/j.1749-6632.1945.tb36170.x ↗
31. Svoboda · Acta Mater · 2010 · 58 · 290510.1016/j.actamat.2010.01.019 ↗
32. Palade · J Alloy Compd · 2003 · 353 · 2310.1016/S0925-8388(02)01203-3 ↗
33. Hohenberg · Phys Rev · 1964 · 136 · B86410.1103/PhysRev.136.B864 ↗
34. Kohn · Phys Rev · 1965 · 140 · A113310.1103/PhysRev.140.A1133 ↗
35. Perdew · Phys Rev B · 1981 · 23 · 504810.1103/PhysRevB.23.5048 ↗
36. Vanderbilt · Phys Rev B · 1985 · 32 · 841210.1103/PhysRevB.32.8412 ↗
37. Elsässer · J Phys: Cond Matter · 1990 · 2 · 4371
38. Lechermann · Phys Rev B · 2002 · 65 · 13210410.1103/PhysRevB.65.132104 ↗
39. Lechermann · Phys Rev B · 2004 · 69 · 16511610.1103/PhysRevB.69.165116 ↗
40. Monkhorst · Phys Rev B · 1976 · 13 · 518810.1103/PhysRevB.13.5188 ↗
41. Fu · Phys Rev B · 1983 · 28 · 548010.1103/PhysRevB.28.5480 ↗
42. Jónsson · 1998 · 385
43. Zhang · Phys Rev Lett · 1991 · 67 · 233910.1103/PhysRevLett.67.2339 ↗
44. Hine · Phys Rev B · 2009 · 79 · 02411210.1103/PhysRevB.79.024112 ↗
45. Bakker · Phys Status Solidi (b) · 1988 · 145 · 40910.1002/pssb.2221450206 ↗
46. Belova · J Phys Chem Solids · 1999 · 60 · 202310.1016/S0022-3697(99)00023-2 ↗
47. Belova · Defect Diffus Forum · 2004 · 224–225 · 4510.4028/www.scientific.net/DDF.224-225.45 ↗
48. Van der Ven · Phys Rev B · 2001 · 64 · 18430710.1103/PhysRevB.64.184307 ↗
49. Xu · Acta Mater · 2011 · 59 · 109510.1016/j.actamat.2010.10.040 ↗
50. Svoboda · Philos Mag B · 1991 · 64 · 74910.1080/13642819108207635 ↗
51. Ferro · Atti Accad Naz Lincei, Ser VIII, Rend, Cl Sci Fis Mat Nat · 1966 · 41 · 85
52. Predel · Z Metallk · 1972 · 63 · 59
53. 1998
54. Belsky · Acta Crystallogr B · 2002 · 58 · 36410.1107/S0108768102006948 ↗
55. Bross · Eur Phys J B · 2004 · 37 · 40510.1140/epjb/e2004-00073-5 ↗
56. Mehl · Phys Rev B · 1996 · 54 · 451910.1103/PhysRevB.54.4519 ↗
57. Cooper · Acta Crystallogr · 1962 · 15 · 57810.1107/S0365110X62001474 ↗
58. Kittel · 1953
59. Okamoto · J Phase Equilib · 1991 · 12 · 11410.1007/BF02663684 ↗
60. Elcock · Phys Rev · 1958 · 109 · 60510.1103/PhysRev.109.605 ↗
61. Balluffi · 2005
62. Mehrer · 2007
63. d’Heurle · Z Metallk · 2004 · 95 · 85210.3139/146.018042 ↗
64. van Loo · Solid State Ion · 1997 · 95 · 9510.1016/S0167-2738(96)00550-4 ↗
65. Philibert · Appl Surf Sci · 1991 · 53 · 7410.1016/0169-4332(91)90245-F ↗
66. Breach · Microelectron Reliab · 2004 · 44 · 97310.1016/j.microrel.2004.02.013 ↗