journal article·2000-01

Progress in scanning probe microscopy

H.K. Wickramasinghe

Acta Materialia· Volume 48· Issue 1
Publisher page

Abstract

Abstract In the past decade, the field of microscopy has been revolutionized by the introduction of a range of microscopies—scanning probe microscopes that are capable of measuring physical and chemical properties on the nanoscale. These microscopes—which were stimulated by the scanning tunneling microscope—have had a major impact on the understanding of material surfaces. The development of the key concepts of scanning probe microscopes is reviewed from their early history to current technologies. Some key applications of scanning probe microscopes are presented and the future advances that are likely to come to fruition in the next decade are discussed.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Force Microscopy Techniques and Applications · Near-Field Optical Microscopy · Surface and Thin Film Phenomena

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (63)

Show source-provided references
1. Binnig · Phys. Rev. Lett. · 1982 · 49 · 5710.1103/PhysRevLett.49.57 ↗
2. Sarid · 1991
3. Wiesendanger · 1994
4. Abbe · Arch. mikrosk. Anat. · 1873 · 9 · 41310.1007/BF02956173 ↗
5. Synge · Phil. Mag. · 1928 · 6 · 35610.1080/14786440808564615 ↗
6. Synge · Phil. Mag. · 1932 · 13 · 29710.1080/14786443209461931 ↗
7. O'Keefe · J. Opt. Soc. Am. · 1956 · 46 · 35910.1364/JOSA.46.000359 ↗
8. Baez · J. Opt. Soc. Am. · 1956 · 46 · 90110.1364/JOSA.46.000901 ↗
9. Ash · Nature · 1972 · 237 · 51010.1038/237510a0 ↗
10. Feenstra · J. Vac. Sci. Technol. · 1987 · B5 · 92310.1116/1.583691 ↗
11. Kaiser · Phys. Rev. Lett. · 1988 · 60 · 140610.1103/PhysRevLett.60.1406 ↗
12. Muralt · Appl. Phys. Lett. · 1986 · 48 · 51410.1063/1.96491 ↗
13. Aitken · 1985
14. Strocio · Phys. Rev. Lett. · 1986 · 57 · 257910.1103/PhysRevLett.57.2579 ↗
15. Ngugen · I.E.E.E. Trans. Electron. Dev. · 1989 · 36 · 267110.1109/16.43771 ↗
16. Krieger · Phys. Rev. · 1990 · B41 · 1022910.1103/PhysRevB.41.10229 ↗
17. Sanchez · Phys. Rev. Lett. · 1999 · 82 · 401410.1103/PhysRevLett.82.4014 ↗
18. Gimzewski · Europhys. Lett. · 1989 · 8 · 43510.1209/0295-5075/8/5/007 ↗
19. Berndt, R., Baratoff, A. and Gimzewski, J. K., Proc. NATO ASI “Basic Concepts and Applications of STM and Related Techniques”, Erice, Italy, 17–29 April 1989. Kluwer, Dordrecht, 1989, p. 269.
20. Persson · Bull. Am. Phys. Soc. · 1990 · 35 · 634
21. Johansson · Phys. Rev. · 1990 · B42 · 921010.1103/PhysRevB.42.9210 ↗
22. Berndt, R., Schlittler, R. R. and Gimzewski, J. K., Proc. Engineering Foundation Conference—Scanned Probe Microscopy: STM and Beyond, Santa Barbara, CA, AIP Conference Proceedings No. 241, 6–11 January 1991.10.1063/1.41426 ↗
23. Williams · Appl. Phys. Lett. · 1986 · 49 · 158710.1063/1.97288 ↗
24. Williams, C. C. and Wickramasinghe, H. K., Proc. IEEE Ultrasonics Symp., IEEE Cat. No. 86CH2375-4, 1986, p. 393.10.1109/ULTSYM.1986.198771 ↗
25. Binnig · Phys. Rev. Lett. · 1986 · 56 · 93010.1103/PhysRevLett.56.930 ↗
26. Majumdar, A., A. Rev. Mater. Sci., in press.
27. Weaver · Nature · 1989 · 342 · 78310.1038/342783a0 ↗
28. Williams · Nature · 1990 · 344 · 31710.1038/344317a0 ↗
29. Stovneng · Phys. Rev. · 1990 · B42 · 921410.1103/PhysRevB.42.9214 ↗
30. Meyer · Appl. Phys. Lett. · 1988 · 53 · 1044
31. Martin · J. appl. Phys. · 1987 · 61 · 472310.1063/1.338807 ↗
32. McClelland · 1987 · Vol. 6B · 307
33. Albrecht · J. Vac. Sci. Technol. · 1988 · A6 · 27110.1116/1.575441 ↗
34. Rugar · Phys. Today · 1990 · 43 · 2310.1063/1.881238 ↗
35. De La Rue · Proc. I.E.E. · 1972 · 119 · 11710.1049/piee.1972.0021 ↗
36. Wickramasinghe, H. K. and Ash, E. A., Proc. MRI Symp. on Optical and Acoustical Microelectronics, Polytechnic Institute of Brooklyn, New York, 1974, p. 413.
37. Royer, D., Dieulesaint, E. and Martin, Y., Proc. IEEE Ultrasonics Symp., IEEE Cat. No. 85CH2209-5, 1985, p. 432.10.1109/ULTSYM.1985.198546 ↗
38. Martin · Appl. Phys. Lett. · 1987 · 50 · 145510.1063/1.97800 ↗
39. Saenz · J. appl. Phys. · 1987 · 62 · 429310.1063/1.339105 ↗
40. Martin · Appl. Phys. Lett. · 1988 · 52 · 24410.1063/1.99482 ↗
41. Sarid · Optics Lett. · 1988 · 13 · 105710.1364/OL.13.001057 ↗
42. Schonenberger · Z. Phys. · 1990 · B80 · 37310.1007/BF01323519 ↗
43. Hartmann, U., A. Rev. Mater. Sci., in press.
44. Mamin · Appl. Phys. Lett. · 1988 · 53 · 156310.1063/1.99952 ↗
45. Martin · Appl. Phys. Lett. · 1988 · 52 · 110310.1063/1.99224 ↗
46. Slinkman, J. A., Williams, C. C., Abraham, D. W. and Wickramasinghe, H. K., Proc. IEEE IEDM Conf., IEEE Cat. No. 90CH2865-4, 90-73, 1990.
47. Abraham · SPIE · 1988 · 897 · 19110.1117/12.944546 ↗
48. Stern · Appl. Phys. Lett. · 1988 · 53 · 271710.1063/1.100162 ↗
49. Williams, C. C., A. Rev. Mater. Sci., in press.
50. Schonenberger · Phys. Rev. Lett. · 1990 · 65 · 316210.1103/PhysRevLett.65.3162 ↗
51. Hamers · Phys. Rev. Lett. · 1990 · 64 · 105110.1103/PhysRevLett.64.1051 ↗
52. Weaver · J. Vac. Sci. Technol. · 1991 · B9 · 156210.1116/1.585424 ↗
53. Weaver · J. Vac. Sci. Technol. · 1991 · B9 · 155910.1116/1.585423 ↗
54. Nonnenmacher · Appl. Phys. Lett. · 1991 · 58 · 292110.1063/1.105227 ↗
55. O'Boyle · Appl. Phys. Lett. · 1999 · 74 · 264110.1063/1.123923 ↗
56. Lewis · Ultramicroscopy · 1984 · 13 · 22710.1016/0304-3991(84)90201-8 ↗
57. Pohl · Appl. Phys. Lett. · 1984 · 44 · 65110.1063/1.94865 ↗
58. Betzig · Science · 1991 · 251 · 146810.1126/science.251.5000.1468 ↗
59. Moener · Phys. Rev. Lett. · 1994 · 73 · 276410.1103/PhysRevLett.73.2764 ↗
60. Wickramasinghe, H. K., Apertureless near-field optical microscope, US Patent 4,947,034, April 1989.
61. Zenhausern · Appl. Phys. Lett. · 1994 · 65 · 162310.1063/1.112931 ↗
62. Zenhausern · Science · 1995 · 269 · 108310.1126/science.269.5227.1083 ↗
63. Martin · Appl. Phys. Lett. · 1997 · 71 · 110.1063/1.119458 ↗