Interdiffusion in epitaxial, single-crystalline Au/Ag thin films studied by Auger electron spectroscopy sputter-depth profiling and positron annihilation
Source abstract
Abstract
Abstract Interdiffusion in epitaxial, single-crystalline Au/Ag bilayered thin films on Si (001) substrates was investigated by Auger electron spectroscopy (AES) sputter-depth profiling and by in-situ positron annihilation Doppler broadening spectroscopy (DBS). By the combination of these techniques identification of the role of vacancy sources and sinks on interdiffusion in the Au/Ag films was possible. It was found that with precise knowledge of the concentration-dependent self-diffusion and impurity diffusion coefficients a distinction between the Darken-Manning treatment and Nernst-Planck treatment can be made, which is not possible on the basis of the determined concentration-depth profiles alone.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Muon and positron interactions and applications · Copper Interconnects and Reliability · Semiconductor materials and interfaces
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (70)
Show source-provided references
1. Zinc diffusion in alpha-brass
2. Measurement of the equilibrium concentration of lattice vacancies in silver near the melting point10.1103/PhysRev.119.600 ↗
3. Measurement of equilibrium concentrations of lattice vacancies in gold10.1103/PhysRev.125.862 ↗
4. Diffusion, mobility and their interrelation through free energy in binary metallic systems
5. Correlation factors for diffusion in nondilute alloys10.1103/PhysRevB.4.1111 ↗
6. Philibert · 1991
7. Microscopic theory of reciprocalm diffusion ina binary system with non-equilibrium vacancies
8. Kinetic theory of mutual diffusion in a binary system. the kirkendall effect
9. Kinetic theory of mutual diffusion in a binary system. concentration of vacancies during mutual diffusion
10. Kinetic theory of mutual diffusion in a binary system. influence of concentration dependence of the coefficients of self-diffusion on the process of mutual diffusion
11. The supersaturation and precipitation of vacancies during diffusion10.1016/0001-6160(54)90159-5 ↗
12. Kirkendall void formation in eutectic snpb solder joints on bare cu and its effect on joint reliability10.1063/1.1839637 ↗
13. Controlled porosity by an extreme kirkendall effect10.1016/0001-6160(74)90059-5 ↗
14. Formation of nanotubes and hollow nanoparticles based on kirkendall and diffusion10.1002/smll.200700382 ↗
15. Migration and annihilation of non-equilibrium point defects in sputter deposited nanocrystalline alpha-Fe films10.1016/j.actamat.2011.05.029 ↗
16. Interdiffusion in InGaAs/GaAs quantum well structures as a function of depth10.1063/1.352884 ↗
17. Interdiffusion: a probe of vacancy diffusion in III-V materials10.1103/PhysRevB.55.15813 ↗
18. Substitutional diffusion in multicomponent solids with non-ideal sources and sinks for vacancies10.1016/j.actamat.2010.01.003 ↗
19. Modelling of the influence of the vacancy source and sink activity and the stress state on diffusion in crystalline solids10.1016/j.actamat.2010.10.054 ↗
20. Effects of coherency stress and vacancy sources/sinks on interdiffusion across coherent multilayer interfaces - Part I: theory10.1016/j.actamat.2012.01.021 ↗
21. Effects of coherency stress and vacancy sources/sinks on interdiffusion across coherent multilayer interfaces - Part II: interface sharpening and intermixing rate10.1016/j.actamat.2012.01.022 ↗
22. The Ag-Au (Silver.old) system10.1007/BF02880317 ↗
23. Self-diffusion in silver-gold solid solutions10.1103/PhysRev.129.617 ↗
24. The vacancy-flow effect in silver-gold alloys10.1016/0001-6160(72)90169-1 ↗
25. AES investigations on low-temperature interdiffusion in thin Au films on Ag (111) Substrates10.1002/pssa.2211060221 ↗
26. Study of diffusion and marker movement in fcc Ag-Au alloys10.1007/s11669-008-9355-3 ↗
27. Isotope-effect for diffusion of silver in gold
28. Diffusion of silver in polycrystalline gold
29. Diffusion of gold in single crystals of silver10.1063/1.1722227 ↗
30. Diffusion in gold and Au-Ag alloys
31. 2015
32. 2012
33. Single and multiple profile fitting of AES and XPS intensity-depth profiles for analysis of interdiffusion in thin films10.1002/sia.5369 ↗
34. MultiPak · 2014
35. From depth resolution to depth resolution function: refinement of the concept for delta layers, singlelayers and multilayers10.1002/(SICI)1096-9918(199909)27:9<825::AID-SIA638>3.0.CO;2-D ↗
36. Interaction of positron beams with surfaces, thin films, and interfaces10.1103/RevModPhys.60.701 ↗
37. Theory of positrons in solids and on solid surfaces10.1103/RevModPhys.66.841 ↗
38. Unprecedented intensity of a low-energy positron beam10.1016/j.nima.2008.05.038 ↗
39. Positron beam characteristics at NEPOMUC upgrade10.1088/1742-6596/505/1/012029 ↗
40. In-situ (C)DBS at high temperatures at the NEPOMUC positron beam line10.1088/1742-6596/443/1/012071 ↗
41. Ananlysis of positron profiling data by means of “VEPFIT”10.1063/1.40182 ↗
42. VEPFIT applied to depth profiling problems10.1016/0169-4332(94)00334-3 ↗
43. The effect of deposition parameters and substrate surface condition on texture, morphology and stress in magnetron-sputter-deposited Cu thin films10.1016/j.tsf.2004.08.006 ↗
44. ARPES study of the surface state from Au/Ag(111): evolution with coverage and photon energy10.1016/S0039-6028(02)01727-2 ↗
45. SRIM - the stopping and range of ions in matter10.1016/j.nimb.2010.02.091 ↗
46. Tracer correlation factors in the random alloy10.1080/01418610008212131 ↗
47. A self-consistent theory of matter transport in a random lattice gas and some simulation results10.1080/01418618908220335 ↗
48. Interdiffusion in strongly ionic insulating compounds: the nernst-planck equation10.1080/14786430701531014 ↗
49. Experimental and calculated Ag + Au + Ge phase diagram10.1007/BF02649254 ↗
50. Interpretation of self-diffusion and vacancy properties in silver10.1002/pssb.19700390232 ↗
51. Self-diffusion measurements in silver at low temperatures using single crystals and slightly deformed crystals10.1002/pssb.2220640119 ↗
52. Interpretation of self-diffusion and vacancy properties in gold10.1002/pssb.19680290126 ↗
53. Mehrer · 2007
54. Ehrhart · 1991
55. Quenching and annealing of lattice vacancies in pure silver10.1103/PhysRev.127.21 ↗
56. Crank · 1975
57. The temperature dependence of the isotope effect for self-diffusion and cobalt impurity-diffusion in gold10.1016/0022-3115(78)90236-2 ↗
58. Isotope effect for self-diffusion in single crystals of silver10.1002/pssb.19700390231 ↗
59. Monovacancy and divacancy contribution to self-diffusion in face-centred cubic metals reanalysis for copper, silver, gold, nickel and platinum10.1080/01418618608244022 ↗
60. Powell · 2011
61. Powell · 2011
62. Self-diffusion in silver10.1103/PhysRev.103.1182 ↗
63. Self-diffusion in silver at low temperatures10.1002/pssb.2220570122 ↗
64. A comparison between microsectioning studies af low-temperature self-diffusion in silver10.1002/pssa.2210500120 ↗
65. Effect of hydrostatic pressure and temperature on the self-diffusion rate in single crystals of silver and gold10.1080/01418618208236183 ↗
66. Self-diffusion of silver in silver-palladium alloys10.1063/1.1743232 ↗
67. Self-diffusion in gold10.1088/0370-1301/70/6/301 ↗
68. Self-diffusion of gold10.1103/PhysRev.103.1246 ↗
69. Self-diffusion measurements in gold single crystals between 286 and 412 °C10.1002/pssb.19690330202 ↗
70. Diffusion of iron, cobalt and nickel in gold10.1016/0001-6160(63)90119-6 ↗