journal article·2020-08Open access

Fabrication of bimorph lead zirconate titanate thick films on metal substrates via the cold sintering-assisted process

Dixiong Wang, Sinan Dursun, Lisheng Gao, Carl S. Morandi, Clive A. Randall, Susan Trolier-McKinstry

Acta Materialia· Volume 195

Abstract

Abstract A novel process was developed for the fabrication of 5–50 µm lead zirconate titanate (PZT) thick films on metal substrates. Tape cast PZT with a methyl cellulose binder was burned out at 275 °C, humidified, and then partially densified at 300 °C by cold sintering with a wet lead nitrate liquid phase. Lamination of the green tape on dense metal foils led to incomplete densification due to constrained sintering. However, when metal foils were replaced with tape cast Cu, fully sintered PZT/Cu/PZT composites were acquired after a secondary heat treatment at 800 °C. The PZT films has a relative permittivity over 500 and a loss tangent ~12% at 100 Hz because of a Cu2O interface between the PZT and Cu presumably formed during the cold sintering process. The polarization-electric field hysteresis loop shows a remanent polarization over 20 µC/cm2, and the e31,f of the samples is -4.7 C/m2.
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Research context

OpenAlex topics: Ferroelectric and Piezoelectric Materials · Dielectric properties of ceramics · Dielectric materials and actuators

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References (65)

Show source-provided references
1. J. Clark, What is the internet of things?, (2016). https://www.ibm.com/blogs/internet-of-things/what-is-the-iot/.
2. A review of thin film solar cell technologies and challenges10.1016/j.rser.2016.12.028 ↗
3. A review of wind energy technologies10.1016/j.rser.2005.08.004 ↗
4. Wave and tidal current energy - A review of the current state of research beyond technology10.1016/j.rser.2015.12.284 ↗
5. Nature and technology of geothermal energy: a review10.1016/S1364-0321(97)00001-4 ↗
6. Experimental and theoretical studies on MEMS piezoelectric vibrational energy harvesters with mass loading10.1016/j.sna.2012.02.028 ↗
7. Conformal piezoelectric energy harvesting and storage from motions of the heart, lung, and diaphragm10.1073/pnas.1317233111 ↗
8. Strongly (001) oriented bimorph PZT film on metal foils grown by RF -sputtering for wrist-worn piezoelectric energy harvesters10.1002/adfm.201801327 ↗
9. A comprehensive review on piezoelectric energy harvesting technology: materials, mechanisms, and applications10.1063/1.5074184 ↗
10. Xue · 2018
11. Priya · 2009
12. Piezoelectric thin films for sensors, actuators, and energy harvesting10.1557/mrs2009.177 ↗
13. Dependence of e31,f on polar axis texture for tetragonal Pb(Zrx,Ti1−x)O3 thin films10.1063/1.4895339 ↗
14. Yeo · 2017
15. Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films10.1063/1.4788728 ↗
16. An experimentally validated bimorph cantilever model for piezoelectric energy harvesting from base excitations10.1088/0964-1726/18/2/025009 ↗
17. Multi-beam shared-inductor reconfigurable voltage/SECE-mode piezoelectric energy harvesting of multi-axial human motion
18. Improving power output for vibration-based energy scavengers10.1109/MPRV.2005.14 ↗
19. Piezoelectric compliant mechanism energy harvesters excited under large base accelerations
20. Energy harvesting using a PZT ceramic multilayer stack10.1088/0964-1726/22/6/065015 ↗
21. A gullwing-structured piezoelectric rotational energy harvester for low frequency energy scavenging10.1063/1.5110368 ↗
22. A low-frequency MEMS piezoelectric energy harvesting system based on frequency up-conversion mechanism10.3390/mi10100639 ↗
23. PLZT thick films for pyroelectric sensors10.1088/0957-0233/8/1/005 ↗
24. Investigation of factors affecting the preparation of PZT thick films10.1016/S0025-5408(00)00402-5 ↗
25. Screen printed PZT thick films using composite film technology10.1080/10584580390259065 ↗
26. Microstructural studies of PZT thick films on Cu foils10.1016/j.actamat.2006.03.006 ↗
27. Fabrication of piezoelectric thick films for high frequency transducers
28. Pb(Mg1/3Nb2/3)O3 and (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 relaxor ferroelectric thick films: processing and electrical characterization10.1023/B:JECR.0000037720.39443.e3 ↗
29. Preparation of piezoelectric 0.1Pb(Zn0.5W0.5)O3–0.9Pb(Zr0.5Ti0.5)O3 solid solution and thick films for low temperature firing on a Si-substrate10.1016/j.jcrysgro.2006.07.005 ↗
30. Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process10.1063/1.364172 ↗
31. Dielectric and piezoelectric properties of PZT composite thick films with variable solution to powder ratios10.1111/j.1551-2916.2009.03065.x ↗
32. Dielectric properties of lithium molybdate ceramic fabricated at room temperature10.1111/jace.13277 ↗
33. Hydrothermal-assisted cold sintering process: a new guidance for low-temperature ceramic sintering10.1021/acsami.6b07481 ↗
34. Cold sintered ceramic nanocomposites of 2D MXene and zinc oxide10.1002/adma.201801846 ↗
35. Demonstration of the cold sintering process study for the densification and grain growth of ZnO ceramics10.1111/jace.14617 ↗
36. Cold sintering and electrical characterization of lead zirconate titanate piezoelectric ceramics10.1063/1.5004420 ↗
37. Cold sintering: current status and prospects10.1557/jmr.2017.262 ↗
38. High quality factor cold sintered Li2MoO4–BaFe12O19 composites for microwave applications10.1016/j.actamat.2018.12.057 ↗
39. Room-temperature densified Li2MoO4 ceramic patch antenna and the effect of humidity10.1111/ijac.12615 ↗
40. Cold sintering approach to fabrication of high rate performance binderless LiFePO4 cathode with high volumetric capacity10.1016/j.scriptamat.2017.12.005 ↗
41. New opportunities in metallization integration in co-fired electroceramic multilayers by the cold sintering process
42. Fabricating piezoceramics at room temperature10.1016/j.jeurceramsoc.2019.04.052 ↗
43. Polarization properties of aggregate PZT films produced at room temperature
44. {001} Oriented piezoelectric films prepared by chemical solution deposition on Ni foils10.1063/1.4886597 ↗
45. Effect of stresses on the dielectric and piezoelectric properties of Pb(Zr0.52Ti0.48)O3 thin films10.1063/1.5095765 ↗
46. Sintering behavior of ceramic films constrained by a rigid substrate10.1111/j.1151-2916.1985.tb15227.x ↗
47. Constrained sintering of low-temperature co-fired ceramics10.1111/j.1551-2916.2006.01079.x ↗
48. Stress development during constrained sintering of alumina/glass/alumina sandwich structure10.1111/j.1151-2916.2002.tb00093.x ↗
49. Electrophoretic deposition of lead zirconate titanate films on metal foils for embedded components10.1111/j.1551-2916.2005.00732.x ↗
50. Demonstration of copper co-fired (Na,K)NbO3 multilayer structures for piezoelectric applications10.1111/jace.14207 ↗
51. The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films10.1016/S0924-4247(98)00161-7 ↗
52. The field induced e31,f piezoelectric and Rayleigh response in barium strontium titanate thin films10.1063/1.4897299 ↗
53. Rahaman · 2003
54. The effect of imprint on remanent piezoelectric properties and ferroelectric aging of PbZr0.52Ti0.48O3 thin films10.1111/jace.16367 ↗
55. Erturk · 2011
56. Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films10.1016/S0924-4247(99)00070-9 ↗
57. Point defects and sintering of lead zirconate-titanate10.1111/j.1151-2916.1971.tb12286.x ↗
58. Preparation of perovskite conductive LaNiO3 films by metalorganic decomposition10.1063/1.115930 ↗
59. Base metal co-fired multilayer piezoelectrics10.3390/act5010008 ↗
60. Holmes · 1976
61. Equilibrium phase diagrams in the systems PbO-Ag and CuO-Ag, J10.1111/j.1151-2916.1993.tb03996.x ↗
62. Liquid-phase sintering of PZT ceramics10.1016/S0955-2219(00)00089-3 ↗
63. Depolarization fields in thin ferroelectric films10.1063/1.1662770 ↗
64. Depolarization effects in thin ferroelectric films10.1080/00150197608241393 ↗
65. Intrinsic and extrinsic size effects in fine-grained morphotropic-phase-boundary lead zirconate titanate ceramics10.1111/j.1151-2916.1998.tb02389.x ↗