Solid state dewetting of polycrystalline Mo film on sapphire
Source abstract
Abstract
Abstract We studied the kinetics of solid state dewetting of a thin Mo film deposited on a sapphire substrate. The overall kinetics of the process can be described by the Johnson-Mehl-Avrami-Kolmogorov equation with two different exponents, indicating a decrease of the holes nucleation rate for the long annealing times. We related this decrease to the role of grain boundaries and triple junctions in the nucleation of holes, and the grain growth in the film during annealing. Every expanding hole was partially surrounded by the elevated, abnormally large grains, while the remaining part of the hole contacted an unperturbed film of the original thickness. The expansion of the holes occurred predominantly in the direction of the flat film. We formulated a kinetic model of hole expansion based on surface diffusion along the edge of a flat rim in the direction of an abnormal elevated grain.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Fluid Dynamics and Thin Films · nanoparticles nucleation surface interactions · Solidification and crystal growth phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (50)
Show source-provided references
1. Solid state dewetting of thin films10.1146/annurev-matsci-070511-155048 ↗
2. Size effect in compression of single-crystal gold microparticles10.1016/j.actamat.2011.04.057 ↗
3. Cross-split of dislocations: an athermal and rapid plasticity mechanism10.1038/srep25966 ↗
4. Au–Sapphire (0001) solid–solid interfacial energy10.1007/s10853-006-0437-5 ↗
5. The equilibrium crystal shape of iron10.1016/j.scriptamat.2016.06.006 ↗
6. Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition10.1063/1.1410322 ↗
7. Guided growth of horizontal GaN nanowires on quartz and their transfer to other substrates10.1021/nn4066523 ↗
8. Activating technology of SnO2 layers by metal particles from ultrathin metal films10.1016/0925-4005(93)85204-N ↗
9. Tunable localized plasmon transducers prepared by thermal dewetting of percolated evaporated gold films10.1021/jp209114j ↗
10. Ordered gold nanostructures on sapphire surfaces: fabrication and optical investigations10.1134/S1063774512030157 ↗
11. Core(Fe)–Shell(Au) nanoparticles obtained from thin Fe/Au bilayers employing surface segregation10.1021/nn504284d ↗
12. Porous model type electrodes by induced dewetting of thin Pt films on YSZ substrates10.1016/j.ssi.2009.11.019 ↗
13. Brandon · 1966 · 66095
14. Capillary instabilities in thin films. II. Kinetics10.1063/1.337691 ↗
15. Capillary instabilities in thin films10.1007/BF02673327 ↗
16. Kinetics of a retracting solid film edge: the case of high surface anisotropy10.1016/j.scriptamat.2011.01.045 ↗
17. Anisotropic hole growth during solid-state dewetting of single-crystal Au–Fe thin films10.1016/j.actamat.2012.02.009 ↗
18. Anisotropic edge retraction and hole growth during solid-state dewetting of single crystal nickel thin films10.1016/j.actamat.2010.09.062 ↗
19. Regular pattern formation through the retraction and pinch-off of edges during solid-state dewetting of patterned single crystal films10.1103/PhysRevB.82.193408 ↗
20. Templated solid-state dewetting to controllably produce complex patterns10.1002/adma.201004095 ↗
21. The equilibrium crystal shape of nickel10.1016/j.actamat.2011.02.021 ↗
22. Solid-Solid interface reconstruction at equilibrated Ni-Al2O3 interfaces10.1016/j.actamat.2012.04.037 ↗
23. Microstructure evolution during dewetting in thin Au films10.1016/j.actamat.2010.07.021 ↗
24. The role of abnormal grain growth on solid-state dewetting kinetics10.1016/j.actamat.2014.08.038 ↗
25. Hillock formation of Pt thin films on single-crystal yttria-stabilized zirconia10.1103/PhysRevB.85.125408 ↗
26. Grain growth: the key to understand solid-state dewetting of silver thin films10.1016/j.scriptamat.2016.01.005 ↗
27. Solid-state dewetting of thin iron films on sapphire substrates controlled by grain boundary diffusion10.1016/j.actamat.2013.01.062 ↗
28. Grain boundary grooving in thin films revisited: the role of interface diffusion10.1016/j.actamat.2014.02.008 ↗
29. Mechanisms of solid-state dewetting of thin Au films in different annealing atmospheres10.1016/j.actamat.2014.09.049 ↗
30. How to control solid state dewetting: a short review10.1016/j.surfrep.2016.03.002 ↗
31. Thermal stability and reconstruction of nanoparticulate Au film on model molecular surface10.1016/j.jcis.2009.01.044 ↗
32. Comparison of the agglomeration behavior of Au and Cu films sputter deposited on silicon dioxide10.1063/1.1556178 ↗
33. The mechanism of initial de-wetting and detachment of thin Au films on YSZ10.1016/j.actamat.2008.09.004 ↗
34. Metastable porosity in thin polycrystalline films10.1016/j.scriptamat.2013.08.021 ↗
35. Crystallographic analysis of the solid-state dewetting of polycrystalline gold film using automated indexing in a transmission electron microscope10.1063/1.4937432 ↗
36. Quantitative analysis of anisotropic edge retraction by solid-state dewetting of thin single crystal film10.1063/1.4788822 ↗
37. Fabrication and mechanical behaviour of Al2O3/Mo nanocomposites10.1007/BF00356661 ↗
38. Influence of structural parameters and transition interface on the fracture property of Al2O3/Mo laminated composites10.1016/j.jeurceramsoc.2014.11.004 ↗
39. Humphreys · 1996 · 281
40. On the role of Fe in the growth of single crystalline heteroepitaxial Au thin films on sapphire10.1016/j.actamat.2013.03.038 ↗
41. Kinetics of phase change. I General theory10.1063/1.1750380 ↗
42. Evaluation of surface-diffusion coefficients from grain-boundary grooving data on Mo, Mo—Re, and Cr10.1179/msc.1981.15.6.275 ↗
43. The surface self-diffusion of Mo, Cb (Nb), and Re10.1007/BF02647068 ↗
44. Une determination du coefficient d'auto-diffusion de surface du molybdene10.1016/0039-6028(76)90172-2 ↗
45. Surface self-diffusion of molybdenum10.1016/0042-207X(94)00133-2 ↗
46. Chemically-induced solid state dewetting of thin Au films10.1016/j.actamat.2017.02.054 ↗
47. Nucleation barrier for volume-conserving shape changes of faceted crystals10.1111/j.1151-2916.2000.tb01173.x ↗
48. Shape evolution by surface diffusion and surface attachment limited kinetics on completely faceted surfaces10.1016/0956-7151(95)00134-H ↗
49. Effect of surface anisotropy on grain boundary grooving10.1023/A:1011270830969 ↗
50. Solid state dewetting and stress relaxation in a thin single crystalline Ni film on sapphire10.1016/j.actamat.2014.04.020 ↗