Point defects at the Σ 5 (012)[100] grain boundary in TiN and the early stages of Cu diffusion: An ab initio study
Source abstract
Abstract
Diffusion of impurities along grain boundaries of compound materials is of high relevance for multiple practical applications. In this work, we perform a case study of Cu-impurity diffusion along the special coincident site lattice model Σ 5 (012)[100] GB in stoichiometric and off-stoichiometric TiN. The study includes a thorough investigation of the GB structure, formation of point defects and their interaction with a Cu-impurity at the interface as well as the evaluation of energy barriers for a few plausible impurity migration pathways along TiN grain boundaries. The results show that one of the most probable diffusion mechanisms (with an activation energy of 0.77 eV) is Cu-interstitial migration along a grain boundary channel. For a non-stoichiometric case when nitrogen vacancies can be present at GB, the results show that they can act as trapping centers for Cu atoms and increase the migration energy barrier to 1.2 eV. However, our results also indicate that at equilibrium conditions the effect of trapping may be reduced due to slightly unfavored segregation of N vacancies at TiN grain boundaries.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Copper Interconnects and Reliability · Semiconductor materials and interfaces
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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