Anodized porous silicon based humidity sensor: evaluation of material characteristics and sensor performance of AU/PSIO2/AU
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Analytical Chemistry and Sensors · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (77)
Show source-provided references
1. Z. Yan, J. Jiang, Y. Zhang, D. Yang, N. Du, Scalable and low-cost synthesis of porous silicon nanoparticles as high-performance lithium-ion battery anode. Mater. Today Nano. 18 (Jun. 2022). https://doi.org/10.1016/j.mtnano.2022.10017510.1016/j.mtnano.2022.100175 ↗
2. X. Sun, P. Sharma, G. Parish, A. Keating, Enabling high-porosity porous silicon as an electronic material. Microporous Mesoporous Mater. 312 (Jan. 2021). https://doi.org/10.1016/j.micromeso.2020.11080810.1016/j.micromeso.2020.110808 ↗
3. R. Moretta, L. De Stefano, M. Terracciano, I. Rea, Porous Silicon Optical Devices: Recent Advances in Biosensing Applications, Sensors (Switzerland), vol. 21, no. 4. MDPI AG, pp. 1–26, Feb. 02, 2021. https://doi.org/10.3390/s2104133610.3390/s21041336 ↗
4. V.S. Selvakumar, L. Sujatha, Fast response and recovery of nano-porous silicon based gas sensor, Microsystem Technologies, vol. 26, no. 3, pp. 823–834, Mar. 2020, https://doi.org/10.1007/s00542-019-04622-w10.1007/s00542-019-04622-w ↗
5. U.M. Nayef, H.T. Hussein, A.M. Abdul Hussien, Study of photoluminescence quenching in porous silicon layers that using for chemical solvents vapor sensor. Optik (Stuttg). 172, 1134–1139 (Nov. 2018). https://doi.org/10.1016/j.ijleo.2018.07.11210.1016/j.ijleo.2018.07.112 ↗
6. J. Kanungo et al., Jul., Improved contacts on a porous silicon layer by electroless nickel plating and copper thickening, Semicond Sci Technol, vol. 21, no. 7, pp. 964–970, 2006, https://doi.org/10.1088/0268-1242/21/7/02310.1088/0268-1242/21/7/023 ↗
7. W. Jo, Y.C. Cho, S. Kim, E.C. Landahl, S. Lee, Reduced Thermal Conductivity in Ultrafast Laser Heated Silicon measured by Time-resolved X-Ray diffraction. Cryst. (Basel). 11(2), 1–11 (Feb. 2021). https://doi.org/10.3390/cryst1102018610.3390/cryst11020186 ↗
8. J. Zhou et al., Direct Observation of large Electron-Phonon Interaction Effect on Phonon Heat Transport. Nat. Commun. 11(1) (Dec. 2020). https://doi.org/10.1038/s41467-020-19938-910.1038/s41467-020-19938-9 ↗
9. Y. Zhao et al., Ultralow Thermal Conductivity of single-crystalline porous Silicon nanowires. Adv. Funct. Mater. 27(40) (Oct. 2017). https://doi.org/10.1002/adfm.20170282410.1002/adfm.201702824 ↗
10. W. Li et al., Enhanced humidity sensitivity with silicon nanopillar array by UV light. Sens. (Switzerland). 18(2) (Feb. 2018). https://doi.org/10.3390/s1802066010.3390/s18020660 ↗
11. B.A. Kuzubasoglu, Recent Studies on the Humidity Sensor: A Mini Review, ACS Applied Electronic Materials, vol. 4, no. 10. American Chemical Society, pp. 4797–4807, Oct. 25, 2022. https://doi.org/10.1021/acsaelm.2c0072110.1021/acsaelm.2c00721 ↗
12. K.-J. Park, M.-S. Gong, A water durable resistive humidity sensor based on rigid sulfonated polybenzimidazole and their properties. Sens. Actuators B Chem. 246, 53–60 (Jul. 2017). https://doi.org/10.1016/j.snb.2017.02.07410.1016/j.snb.2017.02.074 ↗
13. A. Jana et al., Fabrication of P-N heterojunction based MoS2 modified CuPc nanoflowers for humidity sensing. Sens. Actuators Phys. 299, 111574 (Nov. 2019). https://doi.org/10.1016/j.sna.2019.11157410.1016/j.sna.2019.111574 ↗
14. G. Korotcenkov, E. Rusu, How to Improve the Performance of Porous Silicon-Based Gas and Vapor Sensors? Approaches and Achievements, Physica Status Solidi (A) Applications and Materials Science, vol. 216, no. 22, Nov. 2019, https://doi.org/10.1002/pssa.20190034810.1002/pssa.201900348 ↗
15. F. Karbassian, Porous Silicon,Porosity - Process, Technologies and Applications, InTech, 2018. doi: https://doi.org/10.5772/intechopen.7291010.5772/intechopen.72910 ↗
16. E. Monaico, I. Tiginyanu, V. Ursaki, P.S. Compounds, Semicond. Sci. Technol. 35(10), 1–47 (Oct. 2020). https://doi.org/10.1088/1361-6641/ab947710.1088/1361-6641/ab9477 ↗
17. E.J. Connolly, G.M. O’halloran, P.M. Sarro, P.J. French, Investigation of Relative Humidity Sensors Based on Porous Silicon (Porous Polysilicon and Porous Silicon Carbide., 2001)10.1007/978-94-010-0840-2_15 ↗
18. M. Füredi, A. Alvarez-Fernandez, J. Fornerod, B. Fodor, S. Guldin, On the rational design of mesoporous silica humidity sensors, 202210.26434/chemrxiv-2022-60dt1 ↗
19. G. Xu, Y. Xi, X. Chen, Y. Ma, Application research on the sensitivity of porous silicon. J. Semicond. 38(9) (Sep. 2017). https://doi.org/10.1088/1674-4926/38/9/09400310.1088/1674-4926/38/9/094003 ↗
20. R.Z.A. Manj, X. Chen, W.U. Rehman, G. Zhu, W. Luo, J. Yang, Big Potential From Silicon-Based Porous Nanomaterials: In Field of Energy Storage and Sensors, Frontiers in Chemistry, vol. 6, no. NOV. Frontiers Media S.A., Nov. 01, 2018. https://doi.org/10.3389/fchem.2018.0053910.3389/fchem.2018.00539 ↗
21. Y.J. Kwon et al., Porous Si nanowires for highly selective room temperature NO2 gas sensing. Nanotechnology. 29 (May 2018). https://doi.org/10.1088/1361-6528/aac17b10.1088/1361-6528/aac17b ↗
22. B. Gelloz, H. Fuwa, E. Kondoh, L. Jin, Photoetching of Porous Silicon Nanostructures in Hydrofluoric Acid using monochromatic light. ECS J. Solid State Sci. Technol. 7(12), P730–P735 (2018). https://doi.org/10.1149/2.0121812jss10.1149/2.0121812jss ↗
23. J.-C. Lin, Y.-H. Lai, S.-H. Lu, C.-H. Wu, K. Settu, Improvement of a capacitive UV-Sensor by porous Silicon powders embedded in Epoxy on Porous Silicon Film. Opt. Mater. Express. 12(8), 3143 (Aug. 2022). https://doi.org/10.1364/ome.46355110.1364/ome.463551 ↗
24. R. Suryana, D.K. Sandi, O. Nakatsuka, The Morphological Study of Porous Silicon Formed by Electrochemical Anodization Method, in IOP Conference Series: Materials Science and Engineering, Institute of Physics Publishing, Apr. 2018, pp. 1–5. https://doi.org/10.1088/1757-899X/333/1/01203410.1088/1757-899X/333/1/012034 ↗
25. N.L.S. Ngadiman, R. Abdul Rani, S.R. Makhsin, M.A. Ayub, M.A. Abu Talip, A.S. Zoolfakar, Facile fabrication method and decent humidity sensing of anodised nanotubular Ta2O5 on Ta foil substrate, Journal of Materials Science: Materials in Electronics, vol. 33, no. 6, pp. 3065–3080, Feb. 2022, https://doi.org/10.1007/s10854-021-07509-710.1007/s10854-021-07509-7 ↗
26. M.A. Abu Talip et al., Mechanism of Nanotubular Ta2O5 via Anodization in NH4F/H2SO4/H2O solution. Int. J. Electr. Electron. Syst. Res. 14 (2019). https://doi.org/10.13140/RG.2.2.32329.4720410.13140/RG.2.2.32329.47204 ↗
27. T.V.K. Karthik, L. Martinez, V. Agarwal, Porous silicon ZnO/SnO2 structures for CO2 detection. J. Alloys Compd. 731, 853–863 (Jan. 2018). https://doi.org/10.1016/j.jallcom.2017.10.07010.1016/j.jallcom.2017.10.070 ↗
28. H.A. Hadi, Impact of Etching Time on Ideality factor and dynamic resistance of porous Silicon prepared by Electrochemical etching (ECE). Int. Lett. Chem. Phys. Astronomy. 72, 28–36 (Jan. 2017). https://doi.org/10.18052/www.scipress.com/ilcpa.72.2810.18052/www.scipress.com/ilcpa.72.28 ↗
29. S. Mariani, A. Paghi, A.A. La Mattina, A. Debrassi, L. Dähne, G. Barillaro, Decoration of Porous Silicon with Gold Nanoparticles via Layer-by-Layer Nanoassembly for Interferometric and Hybrid Photonic/Plasmonic (Bio)sensing, ACS Appl Mater Interfaces, vol. 11, no. 46, pp. 43731–43740, Nov. 2019, https://doi.org/10.1021/acsami.9b1573710.1021/acsami.9b15737 ↗
30. M. Hosny, D. Wissem, H. Ikbel, E. Hatem, Influence of gold nanoparticles deposition on porous Silicon properties. Sens. Transducers. 27, 202–208 (2014)
31. A.N. Abd, N.A. Bakr, S.M.A. Al Hussan, Porous Silicon Preparation and characterization. Acad. J. Eng. Sci., 3, 2, 2021
32. M.S.I. Khan, S.-W. Oh, Y.-J. Kim, Power of Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis in Rapid Microbial Detection and Identification at the Single Cell Level, Sci Rep, vol. 10, no. 1, pp. 1–10, Feb. 2020, https://doi.org/10.1038/s41598-020-59448-810.1038/s41598-020-59448-8 ↗
33. A.A. Sulaimana, M.M. Alyas, A.M. Muhammed, Porous Silicon (P-Type) prepared by Electrochemical etching and study of structure and morphology properties and Effect of Neutron Irradiation. Dig. J. Nanomater Biostruct. 15(1), 9–14 (2020)10.15251/DJNB.2020.151.9 ↗
34. A. Kapic, A. Tsirou, P.G. Verdini, S. Carrara, Humidity Sensors for High Energy Physics Applications: A Review, IEEE Sens J, vol. 20, no. 18, pp. 10335–10344, Sep. 2020, https://doi.org/10.1109/JSEN.2020.299431510.1109/JSEN.2020.2994315 ↗
35. B.A. Kuzubasoglu, Recent Studies on the Humidity Sensor: A Mini Review, ACS Appl Electron Mater, vol. 4, no. 10, pp. 4797–4807, Oct. 2022, https://doi.org/10.1021/acsaelm.2c0072110.1021/acsaelm.2c00721 ↗
36. K. Kayed, D.B. Kurd, The effect of annealing temperature on the structural and optical properties of Si/SiO2 composites synthesized by thermal oxidation of silicon wafers, 2021. https://doi.org/10.21203/rs.3.rs-246154/v210.21203/rs.3.rs-246154/v2 ↗
37. A. Roland et al., In-depth study of annealed porous silicon: understand the morphological properties effect on negative LiB electrode performance. Electrochim. Acta. 323 (Nov. 2019). https://doi.org/10.1016/j.electacta.2019.13475810.1016/j.electacta.2019.134758 ↗
38. I. Kuzma-Filipek, Sintering of porous Silicon,Handbook of Porous Silicon, Cham: Springer International Publishing, 2018, 901–911. doi: https://doi.org/10.1007/978-3-319-71381-6_6210.1007/978-3-319-71381-6_62 ↗
39. L.M. Henning et al., Hierarchically porous and mechanically stable monoliths from ordered mesoporous silica and their water filtration potential. Nanoscale Adv. 4, 3892–3908 (2022). https://doi.org/10.1039/D2NA00368F10.1039/D2NA00368F ↗
40. C.C. Chiang, B.T.H. Lee, Annihilating pores in the desired layer of a porous Silicon Bilayer with different porosities for layer transfer. Sci. Rep. 9(1) (Dec. 2019). https://doi.org/10.1038/s41598-019-49119-810.1038/s41598-019-49119-8 ↗
41. W. Liu et al., Microstructure and crystallinity of porous silicon and epitaxial silicon layers fabricated on p+ porous silicon. J. Vacuum Sci. Technol. B: Microelectron. Nanometer Struct. 21(1), 168–173 (2003). https://doi.org/10.1116/1.153771410.1116/1.1537714 ↗
42. K.H. Goh et al., Investigation of the effect of anodization time and annealing temperature on the physical properties of ZrO2 thin film on a Si substrate. Mater. Res. Express. 4(8) (Aug. 2017). https://doi.org/10.1088/2053-1591/aa824e10.1088/2053-1591/aa824e ↗
43. P. Zaumseil, High-resolution characterization of the forbidden Si 200 and Si 222 reflections, J Appl Crystallogr, vol. 48, pp. 528–532, Apr. 2015, https://doi.org/10.1107/S160057671500473210.1107/S1600576715004732 ↗
44. R. Prabakaran, G. Raghavan, S. Tripura Sundari, R. Kesavamoorthy, F.P. Xavier, Ellipsometry studies on the effect of etching time in porous silicon, Physica E, vol. 15, pp. 243–251, 2002, [Online]. Available: www.sciencedirect.comwww.elsevier.com/locate/physe10.1016/S1386-9477(02)00571-4 ↗
45. L. Dressler, K. Goetz, J. Krausslich, X-Ray double diffraction (Umweganregung) in SiC monocrystals, 199710.1002/1521-3951(199704)200:2<377::AID-PSSB377>3.0.CO;2-E ↗
46. M.Z. Mohd Yusoff et al., Aug., Annealing Effect on Ultraviolet Sensor Performance with Porous Silicon Based, in IEEE International Conference on Semiconductor Electronics, 2022, pp. 1–4. https://doi.org/10.1109/ICSE56004.2022.986310310.1109/ICSE56004.2022.9863103 ↗
47. H. Kang, Crystalline Silicon vs. Amorphous Silicon: The Significance of Structural Differences in Photovoltaic Applications, in IOP Conference Series: Earth and Environmental Science, IOP Publishing Ltd, Apr. 2021, pp. 1–6. https://doi.org/10.1088/1755-1315/726/1/01200110.1088/1755-1315/726/1/012001 ↗
48. W. Ren, G.D. Yang, A.L. Feng, R.X. Miao, J.B. Xia, Y.G. Wang, Annealing effects on the optical and electrochemical properties of tantalum pentoxide films, Journal of Advanced Ceramics, vol. 10, no. 4, pp. 704–713, Aug. 2021, https://doi.org/10.1007/s40145-021-0465-210.1007/s40145-021-0465-2 ↗
49. A.M. Ruminski, B.H. King, J. Salonen, J.L. Snyder, M.J. Sailor, Porous silicon-based optical microsensors for volatile organic analytes: Effect of surface chemistry on stability and specificity, Adv Funct Mater, vol. 20, no. 17, pp. 2874–2883, Sep. 2010, https://doi.org/10.1002/adfm.20100057510.1002/adfm.201000575 ↗
50. Q. Sheng, J. Sun, Q. Wang, W. Wang, H.S. Wang, On the onset of surface condensation: Formation and transition mechanisms of condensation mode, Sci Rep, vol. 6, Aug. 2016, https://doi.org/10.1038/srep3076410.1038/srep30764 ↗
51. M.H. Mamat et al., Effects of aluminium doping and electrode distance on the performance of aligned zinc oxide nanorod array-based ultraviolet photoconductive sensors. Jpn J. Appl. Phys. 51 (Jun. 2012). 6 PART 2. https://doi.org/10.1143/JJAP.51.06FE0410.1143/JJAP.51.06FE04 ↗
52. N.S. Khairir et al., Electrical behavior of a nanoporous Nb2O5/Pt Schottky contact at elevated temperatures. J. Electron. Mater. 48(1), 611–620 (Jan. 2019). https://doi.org/10.1007/s11664-018-6755-y10.1007/s11664-018-6755-y ↗
53. N. Khairudin et al., Aug., Effect of IDE Spacing on the Performance of ErGO Chemiresistive Humidity Sensor, in 2021 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), IEEE, 2021, pp. 8–11. https://doi.org/10.1109/RSM52397.2021.951160410.1109/RSM52397.2021.9511604 ↗
54. E.C. Dickey, O.K. Varghese, K.G. Ong, D. Gong, M. Paulose, C.A. Grimes, Room Temperature Ammonia and Humidity sensing using highly ordered Nanoporous Alumina films. Sensors. 2, 91–110 (2002)10.3390/s20300091 ↗
55. J. Rouhi et al., The Effect of Gap Width on Field Emission properties of lateral Silicon diodes. Adv. Mat. Res. 1109, 505–508 (Jun. 2015). https://doi.org/10.4028/www.scientific.net/amr.1109.50510.4028/www.scientific.net/amr.1109.505 ↗
56. K.A. Eswar, J. Rouhi, H.F. Husairi, M. Rusop, S. Abdullah, Annealing Heat Treatment of ZnO Nanoparticles Grown on Porous Si Substrate Using Spin-Coating Method, Advances in Materials Science and Engineering, vol. 2014, 2014, https://doi.org/10.1155/2014/79675910.1155/2014/796759 ↗
57. A. Tripathy, S. Pramanik, J. Cho, J. Santhosh, N.A.A. Osman, Role of morphological structure, doping, and coating of different materials in the sensing characteristics of humidity sensors. Sens. (Switzerland). 14(03), 16343–16422 (2014). 9. MDPI AG. https://doi.org/10.3390/s14091634310.3390/s140916343 ↗
58. P. Li, S. Yu, H. Zhang, Preparation and performance analysis of Ag/ZnO humidity sensor. Sens. (Switzerland). 21, 1–9 (Feb. 2021). https://doi.org/10.3390/s2103085710.3390/s21030857 ↗
59. B. Chethan et al., Enhancing humidity sensing performance of Polyaniline/Water Soluble Graphene Oxide Composite. Talanta. 196, 337–344 (May 2019). https://doi.org/10.1016/j.talanta.2018.12.07210.1016/j.talanta.2018.12.072 ↗
60. V. Verma, N.K. Pandey, P. Gupta, K. Singh, P. Singh, Humidity sensing enhancement and structural evolution of Tungsten Doped Zinc Oxide Nano-Sensors fabricated through Co-precipitation Synthesis, pp. 1–57, 2021, https://doi.org/10.21203/rs.3.rs-162049/v110.21203/rs.3.rs-162049/v1 ↗
61. M.H. Mamat, Z. Khusaimi, M.Z. Musa, M.F. Malek, M. Rusop, Fabrication of ultraviolet photoconductive sensor using a novel aluminium-doped zinc oxide nanorod-nanoflake network thin film prepared via ultrasonic-assisted sol-gel and immersion methods, Sens Actuators A Phys, vol. 171, no. 2, pp. 241–247, Nov. 2011, https://doi.org/10.1016/j.sna.2011.07.00210.1016/j.sna.2011.07.002 ↗
62. S.S. Sandhu et al., Nov., Nanoengineered conductive polyaniline enabled sensor for sensitive humidity detection, IEEE Sens J, vol. 20, no. 21, pp. 12574–12581, 2020, https://doi.org/10.1109/JSEN.2020.300159910.1109/JSEN.2020.3001599 ↗
63. Y.Z. Chiou, The substrate-induced effect of GaN MSM photodetectors on silicon substrate. Semicond. Sci. Technol. 23(12) (Dec. 2008). https://doi.org/10.1088/0268-1242/23/12/12500710.1088/0268-1242/23/12/125007 ↗
64. R. Abdul Rani et al., High Surface Area to volume ratio 3D nanoporous Nb2O5 for enhanced humidity sensing. J. Electron. Mater. 48(6), 3805–3815 (Jun. 2019). https://doi.org/10.1007/s11664-019-07126-510.1007/s11664-019-07126-5 ↗
65. N.L.S. Ngadiman et al., Humidity Response of Ta2O5 Sensor at Different Bias Voltages, in IEEE International Conference on Semiconductor Electronics (ICSE), 2020, pp. 1–410.1109/ICSE49846.2020.9166891 ↗
66. S. Park et al., Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films. Sci. Rep. 12(1) (Dec. 2022). https://doi.org/10.1038/s41598-022-15955-410.1038/s41598-022-15955-4 ↗
67. T. Qiang et al., High-performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-ion etching. Sens. Actuators B Chem. 258, 704–714 (Apr. 2018). https://doi.org/10.1016/j.snb.2017.11.06010.1016/j.snb.2017.11.060 ↗
68. R. Andika et al., Organic nanostructure sensing layer developed by AAO template for the application in humidity sensors. J. Mater. Sci.: Mater. Electron. 30(3), 2382–2388 (Feb. 2019). https://doi.org/10.1007/s10854-018-0511-110.1007/s10854-018-0511-1 ↗
69. C.C. Yang, T.H. Liu, S.H. Chang, Relative humidity sensing properties of indium nitride compound with oxygen doping on silicon and AAO substrates. Mod. Phys. Lett. B 33, 14n15 (May 2019). https://doi.org/10.1142/S021798491940044X10.1142/S021798491940044X ↗
70. P. Zhu, H. Ou, Y. Kuang, L. Hao, J. Diao, G. Chen, Cellulose Nanofiber/Carbon Nanotube Dual Network-Enabled Humidity Sensor with High Sensitivity and Durability, ACS Appl Mater Interfaces, vol. 12, no. 29, pp. 33229–33238, Jul. 2020, https://doi.org/10.1021/acsami.0c0799510.1021/acsami.0c07995 ↗
71. Z.-H. Duan et al., Enhanced positive humidity sensitive behavior of p-reduced graphene oxide decorated with n-WS2 nanoparticles. Rare Met. 40(7), 1762–1767 (Jul. 2021). https://doi.org/10.1007/s12598-020-01524-z10.1007/s12598-020-01524-z ↗
72. M. Gülnahar, T. Karacali, H. Efeoğlu, Characterization of electrical transport and properties of an Al/porous Si (PS)/p-Si/Al heterojunction. J. Alloys Compd. 797, 859–864 (Aug. 2019). https://doi.org/10.1016/j.jallcom.2019.04.18210.1016/j.jallcom.2019.04.182 ↗
73. S. Ménard, A. Fèvre, J. Billoué, G. Gautier, P type porous silicon resistivity and carrier transport, J Appl Phys, vol. 118, no. 10, Sep. 2015, https://doi.org/10.1063/1.493022210.1063/1.4930222 ↗
74. R.B. Chongson, Nanoparticle Chemical Sensors: A Study on Optical Humidity Sensor Design ( Rose-Hulman Institute of Technology, 2018)
75. R. Kumar, Solid State Humidity Sensors, in Humidity Sensors - Types and Applications, IntechOpen, 2023. https://doi.org/10.5772/intechopen.9896310.5772/intechopen.98963 ↗
76. H. Farahani, R. Wagiran, M.N. Hamidon, Humidity sensors principle, mechanism, and fabrication technologies: A comprehensive review, Sensors (Switzerland), vol. 14, no. 5. MDPI AG, pp. 7881–7939, Apr. 30, 2014. https://doi.org/10.3390/s14050788110.3390/s140507881 ↗
77. D. Bauskar, B.B. Kale, P. Patil, Synthesis and humidity sensing properties of ZnSnO3 cubic crystallites. Sens. Actuators B Chem. 161(1), 396–400 (Jan. 2012). https://doi.org/10.1016/j.snb.2011.10.05010.1016/j.snb.2011.10.050 ↗