Off-axis RF-sputtered barium titanate thin films for next-generation electro-optic devices
Source abstract
Abstract
Abstract In this work, we report the growth of 300 nm c-axis oriented barium titanate (BTO) films on (001)-strontium titanate (STO) substrates via off-axis radio frequency (RF) sputtering. The as-grown films exhibit exceptional crystallinity, with a rocking curve full width at half maximum of ∼0.03°, and atomically smooth surface morphology with a root mean square roughness of 0.23 nm, ensuring minimal optical losses. Transmission ellipsometric characterization of the film reveals a record-high electro-optic (EO) coefficient, r 51 ∼ 550 pm V−1 that exceeds by a factor of 3 compared to the previously reported values for RF-sputtered BTO. This high-quality, industry-compatible material paves the way for the development of efficient and compact EO modulators based on hybrid BTO-on-silicon waveguides.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Microwave Dielectric Ceramics Synthesis · Optical and Acousto-Optic Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (43)
Show source-provided references
1. Recent advances in polymer electro-optic modulators10.1039/C4RA13250E ↗
2. Electro-optic modulation in integrated photonics10.1063/5.0048712 ↗
3. Indium-tin-oxide for high-performance electro-optic modulation10.1515/nanoph-2015-0006 ↗
4. Silicon-based graphene electro-optical modulators10.3390/photonics9020082 ↗
5. Recent progress in silicon-based slow-light electro-optic modulators10.3390/mi13030400 ↗
6. Roadmapping the next generation of silicon photonics10.1038/s41467-024-44750-0 ↗
7. Multiferroics: progress and prospects in thin films10.1038/nmat1805 ↗
8. Integrated lithium niobate photonic computing circuit based on efficient and high-speed electro-optic conversion10.1038/s41467-025-62635-8 ↗
9. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth10.1364/OE.26.023728 ↗
10. High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit/s and beyond10.1038/s41566-019-0378-6 ↗
11. Lithium niobate: summary of physical properties and crystal structure10.1007/BF00614817 ↗
12. Nanophotonic Pockels modulators on a silicon nitride platform10.1038/s41467-018-05846-6 ↗
13. Nonlinear optics
14. Thin-film BTO-based modulators enabling 200 Gb/s data rates with sub 1 Vpp drive signal
15. Large Pockels effect in micro- and nanostructured barium titanate integrated on silicon10.1038/s41563-018-0208-0 ↗
16. Towards high-performance Pockels effect-based modulators: review and projections10.3390/mi15070865 ↗
17. Dielectric, elastic, piezoelectric, electro-optic, and elasto-optic tensors of BaTiO3 crystals10.1103/PhysRevB.50.5941 ↗
18. PLD epitaxial thin‐film BaTiO3 on MgO—dielectric and electro‐optic properties10.1002/admi.202300665 ↗
19. State of the art, trends, and opportunities for oxide epitaxy10.1063/5.0196883 ↗
20. Preparation and microstructure of BaTiO3 thin films by RF magnetron sputtering10.1088/1742-6596/2961/1/012003 ↗
21. Thick BaTiO3 epitaxial films integrated on Si by RF sputtering for electro-optic modulators in Si photonics10.1021/acsami.1c14048 ↗
22. Growth and characterization of perovskite BaTiO3 thin film for optics and photonics applications10.1117/12.3027290 ↗
23. Surface core-level shifts of strontium observed in photoemission of barium strontium titanate thin films10.1063/1.2357880 ↗
24. XPS analysis of submicrometer barium titanate powder10.1111/j.1551-2916.2004.00371.x ↗
25. Facile preparation of uniform barium titanate (BaTiO3) multipods with high permittivity: impedance and temperature dependent dielectric behavior10.1039/C3RA44815K ↗
26. x-ray photoelectron spectroscopy study on the composition and structure of BaTiO3 thin films deposited on silicon10.1016/S0169-4332(99)00495-X ↗
27. Adsorbed water on hydrothermal BaTiO3 films: work function measurements10.1016/S0042-207X(99)00127-X ↗
28. Understanding the electronic properties of BaTiO3 and Er3+ doped BaTiO3 films through confocal scanning microscopy and XPS: the role of oxygen vacancies10.1039/D0CP01010C ↗
29. Near-infrared light emission of Er3+-doped zirconium oxide thin films: an optical, structural and XPS study10.1016/j.jallcom.2014.09.007 ↗
30. Effects of site substitutions and concentration on the structural, optical and visible photoluminescence properties of Er doped BaTiO3 thin films prepared by RF magnetron sputtering10.1016/j.optmat.2015.04.036 ↗
31. Characterization of BaTiO3 thin films on p-Si10.1016/S1369-8001(00)00109-8 ↗
32. Studies of pulsed laser deposition processes of BaTiO3 thin films10.1016/j.surfcoat.2006.08.117 ↗
33. The dielectric and photochromic properties of defect-rich BaTiO3 microcrystallites synthesized from Ti2O310.1016/j.mseb.2012.03.018 ↗
34. Effect of aspect ratio and surface defects on the photocatalytic activity of ZnO nanorods10.1038/srep04596 ↗
35. Fully ordered Sr2CrReO6 epitaxial films: a high-temperature ferrimagnetic semiconductor10.1103/PhysRevB.85.161201 ↗
36. Control of magnetocrystalline anisotropy by epitaxial strain in double perovskite Sr2FeMoO6 films10.1103/PhysRevLett.110.147204 ↗
37. Quantitative STEM imaging of order–disorder phenomena in double perovskite thin films10.1103/PhysRevLett.117.176101 ↗
38. Third harmonic characterization of antiferromagnetic heterostructures10.1038/s41467-022-31451-9 ↗
39. Metallic ferromagnetic films with magnetic damping under 1.4 × 10−310.1038/s41467-017-00332-x ↗
40. Barium titanate electro-optic modulators
41. Microstructure and ferroelectricity of BaTiO3 thin films on Si for integrated photonics10.1088/1361-6528/aa53c2 ↗
42. RF-sputtered Z-cut electro-optic barium titanate modulator on silicon photonic platform10.1063/5.0160186 ↗
43. Liu · 2022