Direct observation of electron-beam-induced densification and hardening of silica nanoballs by in situ transmission electron microscopy and finite element method simulations

Abstract We report on the use of in situ transmission electron microscopy techniques and finite element method simulations to study the influence of electron beam irradiation on the deformation behavior and mechanical properties of nanoscale amorphous silica balls. We show that, on the nanometer scale, electron beam irradiation of silica results in athermal densification and simultaneous material hardening. It is demonstrated how the amount of densification can be controlled via the irradiation dose, using specific beam current densities inside a transmission electron microscope. The electron-beam-induced densification is interpreted as the direct reason for the observed hardening effect. Finite element method simulations are used to model the mechanical response of the silica balls, confirming that the intrinsic properties (such as the Young’s modulus) of amorphous silica can be tailored with the electron beam on the nanoscale.