Hard and elastic epitaxial ZrB2 thin films on Al2O3(0001) substrates deposited by magnetron sputtering from a ZrB2 compound target
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Boron and Carbon Nanomaterials Research · Advanced ceramic materials synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (37)
Show source-provided references
1. Refractory diborides of zirconium and hafnium10.1111/j.1551-2916.2007.01583.x ↗
2. Electrical resistivity of titanium diboride and zirconium diboride10.1111/j.1151-2916.1995.tb08498.x ↗
3. Material properties of titanium diboride10.6028/jres.105.057 ↗
4. Low stress TiB2 coatings with improved tribological properties10.1016/S0040-6090(01)01481-X ↗
5. Low-stress superhard Ti-B films prepared by magnetron sputtering10.1016/S0257-8972(03)00425-0 ↗
6. Surface and nanoindentation studies on nanocrystalline titanium diboride thin film deposited by magnetron sputtering10.1016/j.tsf.2007.02.076 ↗
7. Self-organized nanocolumnar structure in superhard TiB2 thin films10.1063/1.1887824 ↗
8. Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering10.1016/j.vacuum.2007.07.036 ↗
9. Titanium diboride thin films produced by dc-magnetron sputtering: structural and mechanical properties10.1016/j.surfcoat.2011.01.014 ↗
10. Mechanical and deformation behaviour of titanium diboride thin films deposited by magnetron sputtering10.1016/j.tsf.2008.12.028 ↗
11. Hardness of zirconium diboride films deposited on titanium substrates10.1016/j.matchemphys.2008.06.004 ↗
12. Sputter deposition of decorative boride coatings10.1016/0042-207X(95)00015-1 ↗
13. Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment10.1016/S0257-8972(99)00198-X ↗
14. Zou · 1995
15. ZrB2/Pt/Au Ohmic contacts on bulk, single-crystal ZnO10.1016/j.apsusc.2006.04.058 ↗
16. Sputter deposition of wear-resistant coatings within the system Zr-B-N10.1016/0921-5093(91)90494-8 ↗
17. Synthesis and properties of some refractory transition metal diboride thin films10.1016/0040-6090(83)90010-X ↗
18. Low temperature deposited Zr-B film applicable to extremely thin barrier for copper interconnect10.1016/j.apsusc.2009.05.118 ↗
19. A transmission electron microscopy study on sputtered Zr-B and Zr-B-N films10.1016/0040-6090(91)90160-Y ↗
20. Direct current magnetron sputtered ZrB2 thin films on 4H-SiC(0001) and Si(100)10.1016/j.tsf.2013.11.040 ↗
21. Magnetron sputtering of epitaxial ZrB2 thin films on 4H-SiC(0001) and Si(111)10.1002/pssa.201330308 ↗
22. Deposition of zirconium boride thin films by direct current triode sputtering10.1116/1.574103 ↗
23. ZrB2 Schottky diode contacts on n-GaN10.1016/j.apsusc.2006.04.041 ↗
24. Stoichiometric, epitaxial ZrB2 thin films with low oxygen-content deposited by magnetron sputtering from a compound target: effects of deposition temperature and sputtering power10.1016/j.jcrysgro.2015.08.012 ↗
25. Measurement of the lattice parameters in the individual layers of single-crystal superlattices10.1063/1.360476 ↗
26. Reciprocal space mapping10.1080/10408439708241259 ↗
27. Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology10.1557/jmr.2004.19.1.3 ↗
28. Relationships between hardness, Young's modulus and elastic recovery in hard nanocomposite coatings10.1016/S0257-8972(01)01714-5 ↗
29. Growth of single-crystalline zirconium diboride thin film on sapphire
30. Ahn · 1983
31. Superhard NbB2-x thin films deposited by dc magnetron sputtering10.1016/j.surfcoat.2014.07.087 ↗
32. Cross-sectional transmission electron microscopy studies for deformation behaviors of AlN thin films under Berkovich nanoindentation10.1016/j.jallcom.2010.02.050 ↗
33. The search for novel, superhard materials10.1116/1.581977 ↗
34. Spark plasma sintering of zirconium diborides10.1111/j.1551-2916.2008.02587.x ↗
35. Microstructural design of hard coatings10.1016/j.pmatsci.2006.02.002 ↗
36. Hertzian analysis of the self-consistency and reliability of the indentation hardness measurements on superhard nanocomposite coatings10.1016/S0040-6090(03)00590-X ↗
37. Matkovich · 1977