journal article·2003-01

Size effects in the fatigue behavior of thin Ag films

R Schwaiger, O Kraft

Acta Materialia· Volume 51· Issue 1
Publisher page

Abstract

Abstract Thin film dimensions and microstructure affect the microscopic processes responsible for fatigue. This work focuses on the characterization of such mechanisms and the resulting fatigue behavior. The fatigue behavior of 0.2–1.5 μm thick, Ag films on SiO 2 was investigated. The films were tested using cantilever microbeam deflection with respect to the influence of loading conditions. Extrusions similar to those observed in bulk material were found at the Ag film surfaces after cyclic loading. Voids observed beneath the extrusions, close to the film-substrate interface, contributed significantly to fatigue failure. Fatigue damage was observed to occur predominantly in (100)-oriented grains. Thinner films were more fatigue resistant and contained fewer, smaller extrusions than thicker films.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Electronic Packaging and Soldering Technologies · Copper Interconnects and Reliability · Metal and Thin Film Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (59)

Show source-provided references
1. Nix · Metall. Trans. A · 1989 · 20 · 221710.1007/BF02666659 ↗
2. Thompson · J. Mater. Res. · 1993 · 8 · 23710.1557/JMR.1993.0237 ↗
3. Keller · J. Mater. Res. · 1998 · 13 · 130710.1557/JMR.1998.0186 ↗
4. Hommel · Acta Mater. · 2001 · 49 · 393510.1016/S1359-6454(01)00293-2 ↗
5. Baker · Acta Mater. · 2001 · 49 · 214510.1016/S1359-6454(01)00127-6 ↗
6. Kraft · MRS Bulletin · 2002 · 27 · 3010.1557/mrs2002.17 ↗
7. Suresh · 1998
8. Judelewicz · Mater. Sci. Eng. A · 1994 · 186 · 13510.1016/0921-5093(94)90312-3 ↗
9. Hong · Thin Solid Films · 1996 · 283 · 17510.1016/0040-6090(95)08225-5 ↗
10. Merchant · J. Electronic Mater. · 1999 · 28 · 99810.1007/s11664-999-0176-x ↗
11. Oshida · J. Electronic Packaging · 1991 · 113 · 5810.1115/1.2905367 ↗
12. Hong · 1989 · 93
13. Kuschke · J. Mater. Res. · 1998 · 13 · 296210.1557/JMR.1998.0405 ↗
14. Flinn · J. Appl. Phys. · 1990 · 67 · 292710.1063/1.345411 ↗
15. Schwaiger · Scripta Mater · 1999 · 41 · 82310.1016/S1359-6462(99)00231-6 ↗
16. Oliver · J. Mater. Res. · 1992 · 7 · 156410.1557/JMR.1992.1564 ↗
17. Schwaiger R. Dissertation. Universität Stuttgart, 2001.
18. Schwaiger · 2000 · 201
19. Barr · J. Vac. Sci. Technol. B · 1995 · 13 · 258010.1116/1.588027 ↗
20. Winter · Phil. Mag. · 1974 · 30 · 71910.1080/14786437408207230 ↗
21. Mughrabi · Mater. Sci. Eng. · 1978 · 33 · 20710.1016/0025-5416(78)90174-X ↗
22. Feltner · Acta Metall. · 1967 · 15 · 163310.1016/0001-6160(67)90138-1 ↗
23. Holzwarth · Mater. Sci. Eng. A · 1993 · 164 · 20610.1016/0921-5093(93)90663-Y ↗
24. Johnson · Trans. Metall. Soc. · 1965 · 233 · 1333
25. Polák · Scripta Metall. · 1970 · 4 · 76110.1016/0036-9748(70)90056-6 ↗
26. Polák · Mater. Sci. Eng. · 1987 · 89 · 3510.1016/0025-5416(87)90247-3 ↗
27. Mughrabi · 1980 · 1615
28. Essmann · Phil. Mag. A · 1981 · 44 · 40510.1080/01418618108239541 ↗
29. Piqueras · Phys. Stat. Sol. A · 1972 · 11 · 56710.1002/pssa.2210110220 ↗
30. Antonopoulos · Phil. Mag. · 1976 · 33 · 8710.1080/14786437608221093 ↗
31. Thompson · Phil. Mag. · 1956 · 1 · 11310.1080/14786435608238086 ↗
32. Argon · 1969 · 576
33. Ogura · Trans Japan Inst Metals · 1974 · 15 · 32410.2320/matertrans1960.15.324 ↗
34. Yamamoto · Kristall und Technik. · 1979 · 14 · 127510.1002/crat.19790141019 ↗
35. Essmann · Phil. Mag. A · 1979 · 40 · 73110.1080/01418617908234871 ↗
36. Antonopoulos · Phil. Mag. · 1976 · 34 · 54910.1080/14786437608223793 ↗
37. Figueroa · Mater. Sci. Eng. · 1983 · 60 · 4510.1016/0025-5416(83)90076-9 ↗
38. Mughrabi · 1983 · 5
39. Kim · Acta Metall. · 1978 · 26 · 78910.1016/0001-6160(78)90029-9 ↗
40. Mughrabi · 1982 · 15
41. Rasmussen · Acta Metall. · 1980 · 28 · 146710.1016/0001-6160(80)90047-4 ↗
42. Wang · Mater. Sci. Eng. · 1984 · 65 · 21910.1016/0025-5416(84)90084-3 ↗
43. Pratt · Acta Metall. · 1967 · 15 · 31910.1016/0001-6160(67)90208-8 ↗
44. Kayali · Metall Trans. A · 1982 · 13 · 103310.1007/BF02643400 ↗
45. Plumtree · 1988 · 81
46. Judelewicz · Scripta Metall. Mater. · 1993 · 29 · 146310.1016/0956-716X(93)90337-R ↗
47. Read · Int. J. Fatigue · 1998 · 20 · 20310.1016/S0142-1123(97)00080-7 ↗
48. Schwaiger R, Dehm G, Kraft O. Submitted to Phil Mag A.
49. Kraft · Z. Metallkunde · 2002 · 93 · 39210.3139/146.020392 ↗
50. Kraft · Mater. Sci. Eng. A · 2001 · 319-321 · 91910.1016/S0921-5093(01)00990-X ↗
51. Gao · Acta Mater. · 1999 · 47 · 286510.1016/S1359-6454(99)00178-0 ↗
52. Weiss · Acta Mater. · 2001 · 49 · 239510.1016/S1359-6454(01)00168-9 ↗
53. Basquin · Proc. ASTM · 1910 · 10 · 625
54. Morrow · 1968 · 21
55. Dieter · 1988
56. Venkatraman · J. Mater. Res. · 1992 · 7 · 204010.1557/JMR.1992.2040 ↗
57. Keller · Acta Mater. · 1999 · 47 · 41510.1016/S1359-6454(98)00387-5 ↗
58. Doerner · J. Mater. Res. · 1986 · 1 · 84510.1557/JMR.1986.0845 ↗
59. Kuan · Metall. Trans. A · 1982 · 13A · 38310.1007/BF02643347 ↗