A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading
Source abstract
Abstract
A study has been made of high-cycle fatigue in 2um thick structural films of n+- type, polycrystalline silicon for MEMS applications.
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Research context
OpenAlex topics: Advanced ceramic materials synthesis · Concrete Corrosion and Durability · Advanced Surface Polishing Techniques
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