journal article·2009-03

The relationship between thin film fragmentation and buckle formation: Synchrotron-based in situ studies and two-dimensional stress analysis

Stephan Frank, Ulrich A. Handge, Sven Olliges, Ralph Spolenak

Acta Materialia· Volume 57· Issue 5
Publisher page

Abstract

Fragmentation and buckling of Ta layers with thicknesses of 50, 100, and 200 nm on polyimide substrates was studied by in situ light microscopy and synchrotron analysis. Buckling indicates the presence of compressive stress, which cannot be explained exclusively by a Poisson ratio mismatch. We extended the classical shear lag model and derived a rigorous analytical solution for the biaxial stress field in a single fragment attached to a uniaxially loaded substrate. The presence of cracks not only gives rise to tensile stress relaxation, but also induces compressive stress in the perpendicular direction, which eventually leads to film buckling. The validity of the model has been confirmed using a synchrotron-based technique for the in situ determination of the biaxial coating stress during uniaxial tensile testing. Taking into account the mean crack distance as a function of the applied strain, the model is utilized to determine the residual stress and fracture toughness of thin films.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Numerical methods in engineering · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (54)

Show source-provided references
1. Lacour · Appl Phys Lett · 2003 · 82 · 240410.1063/1.1565683 ↗
2. Li · Appl Phys Lett · 2004 · 85 · 343510.1063/1.1806275 ↗
3. Li · J Mater Res · 2005 · 20 · 327410.1557/jmr.2005.0422 ↗
4. Suo · Appl Phys Lett · 1999 · 74 · 117710.1063/1.123478 ↗
5. Blasco · Nanotechnology · 2005 · 16 · 150610.1088/0957-4484/16/9/016 ↗
6. Fang · J Phys D Appl Phys · 2005 · 38 · 423610.1088/0022-3727/38/23/015 ↗
7. Brooman · Metal Finishing · 2002 · 100 · 4210.1016/S0026-0576(02)80382-8 ↗
8. Zheludkevich · Chem Mater · 2007 · 19 · 40210.1021/cm062066k ↗
9. Kleer · Surf Coat Tech · 1992 · 54/55 · 16710.1016/S0257-8972(09)90045-7 ↗
10. Leterrier · Progr Mater Sci · 2003 · 48 · 110.1016/S0079-6425(02)00002-6 ↗
11. Chiu · J Mater Sci Lett · 1997 · 16 · 17410.1023/A:1018518832762 ↗
12. Stadler · J Am Ceram Soc · 1995 · 78 · 333610.1111/j.1151-2916.1995.tb07974.x ↗
13. Cox · Br J Appl Phys · 1952 · 3 · 7210.1088/0508-3443/3/3/302 ↗
14. Curtin · J Mater Sci · 1991 · 26 · 523910.1007/BF01143218 ↗
15. Morgenstern · J Phys A Math Gen · 1993 · 26 · 452110.1088/0305-4470/26/18/019 ↗
16. Morgenstern · Europhys Lett · 1993 · 22 · 48710.1209/0295-5075/22/7/002 ↗
17. Beuth · Int J Solids Struct · 1992 · 29 · 165710.1016/0020-7683(92)90015-L ↗
18. Xia · J Mech Phys Solids · 2000 · 48 · 110710.1016/S0022-5096(99)00081-2 ↗
19. Hutchinson · Adv Appl Mech · 1992 · 29 · 6310.1016/S0065-2156(08)70164-9 ↗
20. Hornig · Phys Rev E · 1996 · 54 · 429310.1103/PhysRevE.54.4293 ↗
21. Handge · J Mater Sci · 2002 · 37 · 477510.1023/A:1020814314019 ↗
22. Handge · Phys Rev E · 2000 · 61 · 321610.1103/PhysRevE.61.3216 ↗
23. Jansson · Eng Fract Mech · 2006 · 73 · 261410.1016/j.engfracmech.2006.04.013 ↗
24. Leterrier · J Polym Sci B Polym Phys · 1997 · 35 · 146310.1002/(SICI)1099-0488(19970715)35:9<1463::AID-POLB16>3.0.CO;2-4 ↗
25. Leterrier · J Polym Sci B Polym Phys · 1997 · 35 · 144910.1002/(SICI)1099-0488(19970715)35:9<1449::AID-POLB15>3.0.CO;2-6 ↗
26. Leterrier · J Mater Sci Lett · 1997 · 16 · 12010.1023/A:1018585825493 ↗
27. Andersons · Thin Solid Films · 2005 · 471 · 20910.1016/j.tsf.2004.07.007 ↗
28. Weissmantel · Thin Solid Films · 1979 · 61 · L510.1016/0040-6090(79)90452-8 ↗
29. Matuda · Thin Solid Films · 1981 · 81 · 30110.1016/0040-6090(81)90514-9 ↗
30. Gille · Thin Solid Films · 1984 · 120 · 10910.1016/0040-6090(84)90365-1 ↗
31. George · Acta Mater · 2005 · 53 · 41110.1016/j.actamat.2004.09.036 ↗
32. Heinrich · Nano Lett · 2006 · 6 · 202610.1021/nl061225w ↗
33. Hsueh · J Mater Sci · 2003 · 38 · 180910.1023/A:1023200415364 ↗
34. DuPont. Materials data sheet No. H-38492-2 for Kapton®. DuPont de Nemours GmbH, Bad Homburg, Germany.
35. Smithells · 1976
36. Freund · 2003
37. Borgia · Rev Sci Instrum · 2008 · 79 · 04390410.1063/1.2907534 ↗
38. Frank S, Spolenak R. Optical strain measurement by digital image analysis; 2008. Available from: www.mathworks.com/matlabcentral.
39. Frank S, Spolenak R. Determination of crack and buckle density by digital image analysis; 2008. Available from: www.mathworks.com/matlabcentral.
40. Böhm · Rev Sci Instrum · 2004 · 75 · 111010.1063/1.1669124 ↗
41. Patterson · Nucl Instr Meth Phys Res A · 2005 · 540 · 4210.1016/j.nima.2004.11.018 ↗
42. Schmitt · Nucl Instr Meth Phys Res A · 2003 · 501 · 26710.1016/S0168-9002(02)02045-4 ↗
43. Schmitt · Nucl Instr Meth Phys Res A · 2004 · 518 · 43610.1016/j.nima.2003.11.051 ↗
44. Olliges · Acta Mater · 2007 · 55 · 520110.1016/j.actamat.2007.05.039 ↗
45. Davey · Phys Rev · 1925 · 25 · 75310.1103/PhysRev.25.753 ↗
46. Noyan · 1987
47. Soga · J Appl Phys · 1966 · 37 · 341610.1063/1.1708873 ↗
48. Begley · Int J Solids Struct · 2005 · 42 · 525910.1016/j.ijsolstr.2005.02.014 ↗
49. Zhang · Scripta Mater · 2007 · 57 · 103210.1016/j.scriptamat.2007.07.041 ↗
50. Knepper · Appl Phys Lett · 2007 · 90 · 18190810.1063/1.2734468 ↗
51. Freund · 2003
52. Peng · Surf Coat Tech · 2006 · 200 · 273810.1016/j.surfcoat.2004.12.018 ↗
53. Cheng · J Vac Sci Technol B · 2007 · 25 · 14710.1116/1.2431179 ↗
54. Barry Carter · 2007