journal article·2010-10

Microstructure evolution during dewetting in thin Au films

Claudia Manuela Müller, Ralph Spolenak

Acta Materialia· Volume 58· Issue 18
Publisher page

Abstract

Thin metal films can degrade into particles in a process known as dewetting. Dewetting proceeds in several stages, including void initiation, void growth and void coalescence. Branched void growth in thin Au films was studied by means of electron backscatter diffraction (EBSD). The holes were found to protrude into the film predominantly at high angle grain boundaries and the branched shape of the holes can be explained by surface energy minimization of the grains at the void boundaries. (1 1 1) Texture sharpening during dewetting was observed and quantified by EBSD and in situ X-ray studies.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Fluid Dynamics and Thin Films · Block Copolymer Self-Assembly · Copper Interconnects and Reliability

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