journal article·2016-02Open access

Influence of microstructure on the cutting behaviour of silicon

Saurav Goel, Andrii Kovalchenko, Alexander Stukowski, Graham Cross

Acta Materialia· Volume 105

Abstract

We use molecular dynamics simulation to study the mechanisms of plasticity during cutting of monocrystalline and polycrystalline silicon. Three scenarios are considered: (i) cutting a single crystal silicon workpiece with a single crystal diamond tool, (ii) cutting a polysilicon workpiece with a single crystal diamond tool, and (iii) cutting a single crystal silicon workpiece with a polycrystalline diamond tool. A long-range analytical bond order potential is used in the simulations, providing a more accurate picture of the atomic-scale mechanisms of brittle fracture, ductile plasticity, and structural changes in silicon. The MD simulation results show a unique phenomenon of brittle cracking typically inclined at an angle of 45°–55° to the cut surface, leading to the formation of periodic arrays of nanogrooves in monocrystalline silicon, which is a new insight into previously published results. Furthermore, during cutting, silicon is found to undergo solid-state directional amorphisation without prior Si–I to Si-II (beta tin) transformation, which is in direct contrast to many previously published MD studies on this topic. Our simulations also predict that the propensity for amorphisation is significantly higher in single crystal silicon than in polysilicon, signifying that grain boundaries eases the material removal process.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (52)

Show source-provided references
1. Diamond machining of silicon: a review of advances in molecular dynamics simulation10.1016/j.ijmachtools.2014.09.013 ↗
2. Nanotwinning in monocrystalline silicon upon nanoscratching10.1016/j.scriptamat.2011.04.012 ↗
3. Room temperature dislocation plasticity in silicon10.1080/14786430412331315680 ↗
4. Silicon nanoparticles: isolation leads to change10.1038/nnano.2011.124 ↗
5. Deconfinement leads to changes in the nanoscale plasticity of silicon10.1038/nnano.2011.118 ↗
6. Hardness measurement at penetration depths as small as 20 nm10.1080/01418618308234914 ↗
7. Wu · 2012
8. The brittle-to-ductile transition in silicon10.1016/0956-7151(93)90353-T ↗
9. The brittle-to-ductile transition in doped silicon as a model substance10.1016/0001-6160(88)90302-1 ↗
10. Metallic solid silicon10.1038/357645a0 ↗
11. Prediction of the threshold load of dislocation emission in silicon during nanoscratching10.1016/j.actamat.2013.05.035 ↗
12. Modeling solid-state chemistry: interatomic potentials for multicomponent systems10.1103/PhysRevB.39.5566 ↗
13. Erratum: modeling solid-state chemistry: interatomic potentials for multicomponent systems10.1103/PhysRevB.41.3248.2 ↗
14. Analytical potential for atomistic simulations of silicon, carbon, and silicon carbide10.1103/PhysRevB.71.035211 ↗
15. Screened empirical bond-order potentials for Si-C10.1103/PhysRevB.87.205410 ↗
16. Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation10.1088/0957-4484/11/3/307 ↗
17. Atomistic simulations of structural transformations of silicon surfaces under nanoindentation10.1088/0957-4484/15/5/049 ↗
18. Atomistic simulation of structural phase transformations in monocrystalline silicon induced by nanoindentation10.1088/0957-4484/17/9/031 ↗
19. Ideal crystal stability and pressure-induced phase transition in silicon10.1103/PhysRevB.50.14952 ↗
20. Brittle–ductile transition during diamond turning of single crystal silicon carbide10.1016/j.ijmachtools.2012.09.001 ↗
21. Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices10.1016/j.diamond.2010.03.015 ↗
22. Fast parallel algorithms for short-range molecular dynamics10.1006/jcph.1995.1039 ↗
23. Visualization and analysis of atomistic simulation data with OVITO–the open visualization tool10.1088/0965-0393/18/1/015012 ↗
24. Automated identification and indexing of dislocations in crystal interfaces10.1088/0965-0393/20/8/085007 ↗
25. Extracting dislocations and non-dislocation crystal defects from atomistic simulation data10.1088/0965-0393/18/8/085001 ↗
26. Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon10.1016/j.matlet.2011.11.028 ↗
27. Atomistic investigation on the structure–property relationship during thermal spray nanoparticle impact10.1016/j.commatsci.2013.12.011 ↗
28. Atomistic aspects of ductile responses of cubic silicon carbide during nanometric cutting10.1186/1556-276X-6-589 ↗
29. Shear instability of nanocrystalline silicon carbide during nanometric cutting10.1063/1.4726036 ↗
30. Anisotropy of single-crystal 3C–SiC during nanometric cutting10.1088/0965-0393/21/6/065004 ↗
31. Investigation of crack tip dislocation emission in aluminum using multiscale molecular dynamics simulation and continuum modeling10.1016/j.jmps.2013.12.009 ↗
32. Effects of tool edge radius on ductile machining of silicon: an investigation by FEM10.1088/0268-1242/24/7/075018 ↗
33. Ductile regime turning at large tool feed10.1016/S0924-0136(01)01218-3 ↗
34. Nanoindentation of polysilicon and single crystal silicon: molecular dynamics simulation and experimental validation10.1088/0022-3727/47/27/275304 ↗
35. Plastic deformation of nanocrystalline Pd–Au alloys: on the interplay of grain boundary solute segregation, fault energies and grain size10.1016/j.actamat.2011.01.036 ↗
36. Monte Carlo simulations of void-nucleated melting of silicon via modification in the tersoff potential parameters10.1103/PhysRevB.72.125206 ↗
37. Energy landscape of silicon tetra-interstitials using an optimized classical potential10.1002/pssb.201147137 ↗
38. Theory of shear banding in metallic glasses and molecular dynamics calculations10.2320/matertrans.MJ200769 ↗
39. A generalized description of the elastic properties of nanowires10.1021/nl060028u ↗
40. Dieter · 1986
41. Transmission electron microscopy of nanomachined silicon crystals10.1080/01418619408242212 ↗
42. Molecular dynamics simulation investigation on the plastic flow behaviour of silicon during nanometric cutting10.1088/0965-0393/24/1/015002 ↗
43. Room temperature mechanical thinning and imprinting of solid films10.1021/nl0624566 ↗
44. Study on critical rake angle in nanometric cutting10.1007/s00339-012-6973-8 ↗
45. Wear mechanism of diamond tools against single crystal silicon in single point diamond turning process10.1016/j.triboint.2012.06.027 ↗
46. Influence of temperature and crystal orientation on tool wear during single point diamond turning of silicon10.1016/j.wear.2012.02.010 ↗
47. Mechanism of shear-induced metallization10.1007/BF01692009 ↗
48. Virtual diffraction analysis of Ni [0 1 0] symmetric tilt grain boundaries10.1088/0965-0393/21/5/055020 ↗
49. Preparation of nanodimensional CdS by chemical dipping technique and their characterization10.1590/S1516-14392011005000015 ↗
50. Pressure induced crystallization in amorphous silicon10.1063/1.3592963 ↗
51. Ductile-regime turning mechanism of single-crystal silicon10.1016/0141-6359(95)00054-2 ↗
52. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining10.1016/j.precisioneng.2008.10.008 ↗