Effect of irradiation ion species on internal stress in boron thin films
Bibliographic record
Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Metal and Thin Film Mechanics · Boron and Carbon Nanomaterials Research
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References (8)
Show source-provided references
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5. Saidoh · Jpn. J. Appl. Phys. · 1993 · 32 · 396810.1143/JJAP.32.3276 ↗
6. Winter · J. Nucl. Mater. · 1990 · 176–177 · 1410.1016/0022-3115(90)90025-I ↗
7. Sinha · J. Appl. Phys. · 1987 · 49 · 242310.1063/1.325084 ↗
8. Matsunami · IPPJ-AM-32 · 1983