Sputtering of silicon carbide coatings by low-energy hydrogen ions
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics
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References (12)
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8. M. Fukutomi et al., to be published.
9. Davis · 1976
10. Uchiyama · 1972
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12. Grant · Phys. Letters · 1970 · 33A · 38610.1016/0375-9601(70)90845-5 ↗