Low pressure RF discharge in electronegative gases for plasma processing
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Abstract
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Plasma Applications and Diagnostics · Electrohydrodynamics and Fluid Dynamics
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References (12)
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1. Makabe · J. Phys. · 1987 · D21 · 1988
2. Makabe · J. Phys. · 1987 · D20 · 1243
3. Boeuf · Phys. Rev. · 1987 · A36 · 278210.1103/PhysRevA.36.2782 ↗
4. Kusher · J. Appl. Phys. · 1983 · 54 · 495810.1063/1.332763 ↗
5. Zakharov · Fiz. Plazmy · 1988 · 4 · 327
6. Vasilyeva · Fiz. Plazmy · 1989 · 15 · 190
7. Abishev · Fiz. Plazmy · 1990 · 16 · 844
8. Klopovsky · 1992 · 73
9. Feoktistov · IEEE Trans. Plasma Sci. · 1991 · 19 · 16310.1109/27.106810 ↗
10. Volkova · Fiz. Plazmy · 1992 · 18 · 911
11. Volkova · Fiz. Plazmy · 1992 · 18 · 1452
12. Bobrovsky · 1988