Efficiency of defect production in cascades
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Abstract
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Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · Copper Interconnects and Reliability
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References (13)
Show source-provided references
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8. Merkle · Phys. Rev. Lett. · 1977 · 38 · 42410.1103/PhysRevLett.38.424 ↗
9. Robinson · Phys. Rev. · 1974 · B9 · 500810.1103/PhysRevB.9.5008 ↗
10. Beeler · Phys. Rev. · 1966 · 150 · 47010.1103/PhysRev.150.470 ↗
11. M.W. Guinan, private communication.
12. Averback · 1975 · 1048
13. R.S. Averback, L.J. Thompson and K.L. Merkle, this Conference.