journal article·1993-05

Plasma-assisted surface modification and radical diagnostics

H. Sugai, M. Yamage, Y. Hikosaka, T. Nakano, H. Toyoda

Journal of Nuclear Materials· Volume 200· Issue 3
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Diamond and Carbon-based Materials Research

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References (16)

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12. Sugai · J. Vac. Sci. Technol. · 1992 · A10 · 119310.1116/1.578226 ↗
13. Nakano · Jpn. J. Appl. Phys. · 1992 · 31 · 291910.1143/JJAP.31.2919 ↗
14. Toyoda · 1991 · 157
15. Hikosaka · Jpn. J. Appl. Phys. · 1993 · 32
16. Sugai · Appl. Phys. Lett. · 1990 · 56 · 261610.1063/1.103264 ↗