journal article·1986-11

Sputtering of pyrolytic graphite with oxygen ions at various target temperatures

E. Hechtl, J. Bohdansky

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Abstract

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Research context

OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Diamond and Carbon-based Materials Research

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References (6)

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1. Hechtl · J. Nucl. Mater. · 1981 · 103/104 · 33310.1016/0022-3115(82)90619-5 ↗
2. Hechtl · J. Nucl. Mater. · 1984 · 122/123 · 143110.1016/0022-3115(84)90280-0 ↗
3. Verhandlungen der Deutschen Physikalischen Gesellschaft
4. Hechtl · Nucl. Instr. and Meth. · 1981 · 186 · 45310.1016/0029-554X(81)90939-3 ↗
5. Infrared Thermometer by E2 Technology, Carpinteria, California, USA.
6. Micro Pyrometer by Pyro-Werke GmbH Hannover, Hebbelstr. 5, West Germany.