journal article·1997-02

Angle resolved velocity distributions of sputtered medium Z atoms

A. Goehlich, N. Niemöller, H.F. Döbele

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Abstract

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Research context

OpenAlex topics: Ion-surface interactions and analysis · Laser-induced spectroscopy and plasma · Diamond and Carbon-based Materials Research

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References (7)

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1. Goehlich · Nucl. Instr. Methods B · 1996 · 115 · 48910.1016/0168-583X(95)01448-9 ↗
2. Sigmund · 1981 · Vol. 1
3. Bay · Nucl. Instrum. Methods B · 1987 · 18 · 43010.1016/S0168-583X(86)80068-4 ↗
4. Dullni · Appl. Phys. A · 1987 · 38 · 13110.1007/BF00620464 ↗
5. Dullni · Nucl. Instrum. Methods B · 1984 · 2 · 61010.1016/0168-583X(84)90276-3 ↗
6. JANAF Thermochemical Tables
7. Anderson · 1981 · Vol. 1