Planar magnetron glow discharge on copper — The Thornton relation revisited
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Advanced Sensor Technologies Research
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References (9)
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1. Thornton · J. Vac. Sci. Technol. · 1978 · 15 · 17110.1116/1.569448 ↗
2. Abril · J. Vac. Sci. Technol. · 1984 · A4 · 1773
3. Guimarães · J. Vac. Sci. Technol. · 1991 · A9 · 13310.1116/1.577113 ↗
4. Sheridan · J. Vac. Sci. Technol. · 1990 · A8 · 3010.1116/1.577093 ↗
5. Westwood · J. Appl. Phys. · 1983 · 54 · 684110.1063/1.332006 ↗
6. Rossnagel · J. Vac. Sci. Technol. · 1987 · A5 · 227610.1116/1.574434 ↗
7. Rossnagel · J. Vac. Sci. Technol. · 1988 · A6 · 22310.1116/1.574985 ↗
8. Chapman · 1980
9. Hoffman · J. Vac. Sci. Technol. · 1985 · A3 · 56110.1116/1.572994 ↗