Materials issues in microelectromechanical systems (MEMS)

Abstract Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given.