journal article·1998-10Open access

Dynamical simulation for sputtering of B4C

T Kenmotsu, T Kawamura, T Ono, Y Yamamura

Abstract

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Research context

OpenAlex topics: Ion-surface interactions and analysis · Nuclear Materials and Properties · Metal and Thin Film Mechanics

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References (9)

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9. Y. Yamamura, N. Itoh, Sputtering yield, in: T. Itoh (Ed.), Ion Beam Assisted Film Growth, ch. 4, Elsevier, Amsterdam, 198910.1016/B978-0-444-87280-7.50009-2 ↗