Radiation damage of mesoporous silica thin films monitored by X-ray reflectivity and scanning electron microscopy

Abstract An innovative approach to investigate the effects of irradiation on mesoporous structure is proposed from the characterisation of thin mesoporous silica films by X-ray reflectivity measurements coupled with scanning electron microscopy observations. Two different geometries of mesoporous thin films were irradiated with Xe ion beam. A collapse or a complete destruction of the porous structure depending on the pristine pore structure and an increase of the porosity attributed to track formation are discussed.