Oxygen gettering properties of boron film produced by diborane dc glow discharge

journal article·1997-09

T. Hino, T. Mochizuki, Y. Hirohata, K. Tsuzuki, N. Inoue, A. Sagara, N. Noda, O. Motojima, K. Mori, T. Sogabe, K. Kuroda

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OpenAlex topics: Metal and Thin Film Mechanics · Fusion materials and technologies · Diamond and Carbon-based Materials Research

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