Application of atmospheric CVD for internal surface coating of graphite conduit by silicon carbide

Abstract Mechanism of silicon carbide coating on the internal surface of the graphite tube of dimension ϕ 3 mm ID × ϕ 10 mm OD × ϕ 235 mm and surface area ∼24.5 cm 2 has been investigated. Atmospheric pressure chemical vapor deposition (APCVD) method in mass controlled domain has been applied. Methyltrichlorosilane (MTS) as precursor was used in the present investigation. The coating was characterized by X-ray micro tomography (μCT). The coating thickness and composition were analyzed by scanning electron microscopy energy-dispersive spectroscopy (SEM–EDS). The coating phase analyzed by X-ray diffraction (XRD). It has been concluded that silicon carbide coating is a predominantly boundary layer phenomena and the engineering of the same could open up the prospects to accomplish SiC coating on complex pipe line structures on macro scale.