Computer simulation of the sputtering of polyatomic multilayered materials with consideration of the spatial overlapping of the collision cascades
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research
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References (9)
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3. Ber · Nauchnoe Priborostroenic (Scientific Instrumentation) · 1992 · 2 · 31
4. Zhurkin · Proc. of XI Conf. Ion-Surface Interaction 1993 · 1993 · 3 · 105
5. Biersack · Appl. Phys. · 1984 · A34 · 7310.1007/BF00614759 ↗
6. Kinchin · Rep. Progr. Phys. · 1955 · 18 · 110.1088/0034-4885/18/1/301 ↗
7. Ber · Ninth International Conference on Ion Beam Modification of Materials, Book of Abstract, Canberra, Australia · 1995 · 04.096
8. Wittmaack · J. Vac. Sci. Technol. B · 1994 · 12 · 25810.1116/1.587150 ↗
9. Behrish · Nucl. Instr. Meth. B · 1987 · 18 · 62910.1016/S0168-583X(86)80101-X ↗