Design and installation of DC plasma reactor for SiC nanoparticle production

Abstract In order to get the high quality SiC nanopowders, a DC plasma reactor system with adjustable torch has been developed. SiC nanopowders were synthesized using this system and the synthesized primary particles have nearly spherical structures, mostly β-SiC phase with a particle size of 10–30 nm. Larger aggregate particles have been produced in our system probably due to longer particle growth times and faster collisions. The synthesized particles collected from the reactor wall and cyclone bottom have some free silicon and free carbon. To produce high quality silicon carbide nanopowders, it is highly necessary to improve the experimental conditions such as lower system pressures, shorter residence time, and higher quenching rates during powder synthesis.