Low-temperature deposition of TaB and TaB2 by chemical vapor deposition
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · MXene and MAX Phase Materials · Advanced ceramic materials synthesis
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References (13)
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8. Randich · Thin Solid Films · 1979 · 63 · 30910.1016/0040-6090(79)90034-8 ↗
9. Randich · Thin Solid Films · 1980 · 72 · 51710.1016/0040-6090(80)90541-6 ↗
10. Motojima · J. Mater. Sci. · 1979 · 14 · 285910.1007/BF00611466 ↗
11. Schunk · 1969 · 99
12. Hansen · 1958 · 259
13. Mott · 1956