journal article·1995-01

Revised formulae for sputtering data

C. García-Rosales, W. Eckstein, J. Roth

Journal of Nuclear Materials· Volume 218· Issue 1
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Ion-surface interactions and analysis · Nuclear Physics and Applications · Nuclear Materials and Properties

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (20)

Show source-provided references
1. Sigmund · Phys. Rev. · 1969 · 184 · 38310.1103/PhysRev.184.383 ↗
2. Bohdansky · Nucl. Instr. and Meth. B · 1984 · 2 · 58710.1016/0168-583X(84)90271-4 ↗
3. Yamamura · IPPJ-AM-26 · 1983
4. Sputtering Data, Max-Planck-Institut fur Plasmaphysik
5. Data on Low Energy Light Ion Sputtering, Max-Planck-Institut fur Plasmaphysik
6. Thomas · 1927 · 23 · 542
7. Fermi · Z. Phys. · 1928 · 48 · 7310.1007/BF01351576 ↗
8. Matsunami · Radiat. Eff. Lett. · 1980 · 57 · 1510.1080/01422448008218676 ↗
9. Biersack · Appl. Phys. A · 1984 · 34 · 7310.1007/BF00614759 ↗
10. Wilson · Phys. Rev. B · 1977 · 15 · 245810.1103/PhysRevB.15.2458 ↗
11. The Stopping and Range of Ions in Solids
12. Bohdansky · J. Appl. Phys. · 1980 · 51 · 286110.1063/1.327954 ↗
13. Bohdansky · J. Appl. Phys. · 1981 · 52 · 161010.1063/1.329654 ↗
14. Eckstein · Nucl. Instr. and Meth. B · 1993 · 83 · 9510.1016/0168-583X(93)95913-P ↗
15. Sputtering by Particle Bombardment I
16. Robinson · J. Appl. Phys. · 1983 · 54 · 265010.1063/1.332267 ↗
17. Gott · 1978
18. Lindhard · Vidensk. Selsk. Mat.-Fys. Medd. · 1963 · 33
19. Andersen · Nucl. Instr. and Meth. · 1965 · 38 · 23810.1016/0029-554X(65)90144-8 ↗
20. Computer Simulation of Ion-Solid Interaction