New fit formulae for the sputtering yield
Source abstract
Abstract
New fit formulae for the energy and angular dependencies of the sputtering yield are proposed. Though they are empirical they give a better description of yield data, especially near the threshold for the energy dependence and at low mass ratios for the angular dependence. The new formula for the energy dependence was applied to determine threshold energies for different mass ratios.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ion-surface interactions and analysis · Metal and Thin Film Mechanics · Nuclear Materials and Properties
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References (16)
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