Detecting Phase-Type Defects of Transparent Samples Using Infrared Phase-Shifting Shearing Interferometer
Source abstract
Abstract
A shearing interferometer based on the use of a low-coherence short-wave infrared source, two Savart shear devices, and the phase-shifting technique is proposed in this research. It is free of speckle-noise and robust to environmental perturbations, and it is capable to identify phase-type defects in the inspected sample using a gradient image obtained by the phase-shifting technique. This paper introduces the configuration, measurement theory, experimental setup, and experimental results of the proposed interferometer. The results confirm the capability of defect detections of the proposed interferometer.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Optical measurement and interference techniques · Surface Roughness and Optical Measurements · Thermography and Photoacoustic Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (20)
Show source-provided references
1. Tsai, C.S., Wang, S.K., Lee, C.C.: Visualization of solid material joints using a transmission type scanning acoustic microscope. Appl. Phys. Lett. 31, 317–320 (1977)10.1063/1.89684 ↗
2. Wickramasinghe, H.K.: Scanning acoustic microscopy: a review. J. Microsc. 129, 63–73 (1983)10.1111/j.1365-2818.1983.tb04161.x ↗
3. Wang, J.K., Tsai, C.S.: Acoustic transmission and image contrast of tilted plate specimens in transmission acoustic microscopy. IEEE Trans. Sonics Ultrason. 32, 241–247 (1985)10.1109/T-SU.1985.31590 ↗
4. Nakagaki, R., Honda, T., Nakamae, K.: Automatic recognition of defect areas on a semiconductor wafer using multiple scanning electron microscope images. Meas. Sci. Technol. 20, 12 (2009)10.1088/0957-0233/20/7/075503 ↗
5. Zontak, M., Cohen, I.: Defect detection in patterned wafers using multichannel scanning electron microscope. Signal Process. 89, 1511–1520 (2009)10.1016/j.sigpro.2009.02.010 ↗
6. Kuwajima, M., Mendenhall, J.M., Lindsey, L.F., Harris, K.M.: Automated transmission-mode scanning electron microscopy (tSEM) for Large volume analysis at nanoscale resolution. PLoS ONE 8, e59573 (2013)10.1371/journal.pone.0059573 ↗
7. Ibarra-Castanedo, C., Bendada, A., Avdelidis, N.P., Maldague, X.P.V.: Nondestructive assessment of glass fibre composites by mid-wave and near infrared vision. Mater. Trans. 53, 601–603 (2012)10.2320/matertrans.I-M2011856 ↗
8. Höglund, J., Kiss, Z., Nadudvari, G., Kovacs, Z., Velkei, S., Moore, C., Vartanian, V., Allen, R.A.: Detection and characterization of three-dimensional interconnect bonding voids by infrared microscopy. J. Micro/Nanolith. MEMS MOEMS 13, 8 (2014)10.1117/1.JMM.13.1.011208 ↗
9. Chen, X., Liu, N., You, B., Xiao, B.: A novel method for surface defect inspection of optic cable with short-wave infrared illuminance. Infrared Phys. Technol. 77, 456–463 (2016)10.1016/j.infrared.2016.07.001 ↗
10. Hariharan, P.: Interferometry with lasers. Prog. Opt. 24, 103–164 (1987)10.1016/S0079-6638(08)70302-0 ↗
11. Hariharan, P.: Optical interferometry. Rep. Prog. Phys. 54, 339–390 (1991)10.1088/0034-4885/54/3/001 ↗
12. Dudi, O., Grubbs, W.T.: Laser interferometric technique for measuring polymer cure kinetics. J. Appl. Polym. Sci. 74, 2133–2142 (1999)10.1002/(SICI)1097-4628(19991128)74:9<2133::AID-APP3>3.0.CO;2-X ↗
13. Liu, S., Ume, I.C., Achari, A., Gamalski, J.: “Capabilities of a flip chip defects inspection method by using laser techniques. Proc. SPIE 4428, 31–36 (2001)10.1117/12.438421 ↗
14. Inoue, K., Komatsu, S., Trinh, X.A., Norisuye, T., Tran-Cong-Miyata, Q.: Local deformation in photo-crosslinked polymer blends monitored by Mach-Zehnder interferometry. J. Polym. Sci. B 43, 2898–2913 (2005)10.1002/polb.20593 ↗
15. Munoz, V.H.F., Arellano, N.I.T., Garcia, D.I.S., Garcia, A.M., Zurita, G.R., Lechuga, L.G.: Measurement of mean thickness of transparent samples using simultaneous phase shifting interferometry with four interferograms. Appl. Opt. 55, 4047–4051 (2016)10.1364/AO.55.004047 ↗
16. Gasvik, K.J.: Interference, Chap. 3. In: Optical Metrology, 3rd ed., Wiley, Hoboken (2003)10.1002/0470855606 ↗
17. Hecht, E.: Interference, Chap. 9. In: Optics, 5th ed., Pearson Education, Ltd, London
18. Francon, M., Mallick, S.: Polaized Interferometer, Wiley, Hoboken (1972)
19. Guo, X., Zeng, A., Huang, H.: Spatial phase-shifting lateral shearing interferometer. Proc. SPIE 7160, 8 (2008)
20. Cloud, G.: Phase shifting to improve interferometry, Chap. 22. In: Optical Methods of Engineering Analysis, Cambridge University Press, Cambridge