journal article·1987-12

Effect of hydrogen dilution on structure of a-Si : H prepared by substrate impedance tuning technique

Shinji Matsuo, Masato Ueda, Takeshi Imura, Yukio Osaka

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Thermography and Photoacoustic Techniques

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References (8)

Show source-provided references
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5. Yamasaki · Jpn. J. Appl. Phys. · 1981 · 20 · L66510.1143/JJAP.20.L665 ↗
6. Jpn. J. Appl. Phys. · 1987 · 26
7. Shimizu · Jpn. J. Appl. Phys. · 1982 · 21 · L35110.1143/JJAP.21.L351 ↗
8. Yamasaki · Solid State Commun. · 1984 · 50 · 910.1016/0038-1098(84)90048-6 ↗