The observation of plasma induced defect density at a-Si:H interface by quasi-static C-V measurement
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Semiconductor materials and devices
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References (7)
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5. Physics of Semiconductor Devices
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7. Takahagi · J. Appl. Phys. · 1988 · 64 · 351610.1063/1.341489 ↗