Deposition and properties of a-Si:H by cylindrical diode glow discharge

journal article·1983-12

K. Tsuji, S. Minomura, T. Hiraga, A. Sekiguchi, M. Nagasaka

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence

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Show source-provided references

1. Matsuda · J. Non-Cryst. Solids · 1980 · 35&36 · 18310.1016/0022-3093(80)90591-8 ↗

2. Kampas · J. Appl. Phys. · 1981 · 52 · 128510.1063/1.329752 ↗

3. Haller · Appl. Phys. Lett. · 1980 · 37 · 28210.1063/1.91907 ↗

4. Turban · Thin Solid Films · 1981 · 77 · 28710.1016/0040-6090(81)90320-5 ↗

5. Matsuda · Thin Solid Films · 1982 · 92 · 17110.1016/0040-6090(82)90200-0 ↗

6. S. Minomura, K. Tsuji, T. Hiraga, M. Matsumura, K. Fukui, T. Yoshida and Y. Okayasu, this volume.