Investigation of the film growth of a new titanium precursor for MOCVD
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OpenAlex topics: Transition Metal Oxide Nanomaterials · ZnO doping and properties · Semiconductor materials and devices
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References (17)
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1. Augustynski · 1988
2. Fleischer · Sensors Actuators · 1991 · B4 · 43710.1016/0925-4005(91)80148-D ↗
3. Pulker · Appl. Opt. · 1979 · 18 · 196910.1364/AO.18.001969 ↗
4. Yeung · Thin Solid Films · 1983 · 109 · 16910.1016/0040-6090(83)90136-0 ↗
5. Fredriksson · J. Vac. Sci. Technol. · 1986 · A4 · 270610.1116/1.573710 ↗
6. Yokozawa · Jpn. J. Appl. Phys. · 1968 · 7 · 9610.1143/JJAP.7.96 ↗
7. Rausch · J. Electrochem. Soc. · 1993 · 140 · 14310.1149/1.2056076 ↗
8. Fitzgibbons · J. Electrochem. Soc. · 1972 · 119 · 73510.1149/1.2404316 ↗
9. Minoura · Ber. Bunsenges. Phys. Chem. · 1985 · 89 · 106410.1002/bbpc.19850891010 ↗
10. Siefering · J. Electrochem. Soc. · 1990 · 137 · 120610.1149/1.2086632 ↗
11. E.C. Plappert F.-R. Lang and K.-H. Dahmen, manuscript in preparation.
12. Plappert · 1995
13. Becht · Chem. Mater. · 1993 · 5 · 13710.1021/cm00025a026 ↗
14. 1982 · F
15. Hitchman · 1981 · 249
16. Hitchmann · 1993
17. Radecka · Appl. Surf. Sci. · 1993 · 65&66 · 22710.1016/0169-4332(93)90663-V ↗