journal article·1995-07

Investigation of the film growth of a new titanium precursor for MOCVD

F.-R. Lang, E.C. Plappert, K.-H. Dahmen, R. Hauert, P. Nebiker, M. Döbeli

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Abstract

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Research context

OpenAlex topics: Transition Metal Oxide Nanomaterials · ZnO doping and properties · Semiconductor materials and devices

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References (17)

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