An innovative process sequence to obtain reliable nitrided active dielectrics
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OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Analytical Chemistry and Sensors
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References (6)
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2. Fukuda · 1996 · Vol. 3 · 15
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4. Ghidini · 1996 · 645
5. Carr · Appl. Phys. Lett. · 1995 · 66 · 149210.1063/1.113665 ↗
6. Yankova · Solid State Electronics · 1987 · 30 · 93910.1016/0038-1101(87)90130-4 ↗