Electronic transport properties of a-SiYH alloy films deposited by rf sputtering
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OpenAlex topics: Semiconductor materials and interfaces · Copper Interconnects and Reliability · Semiconductor materials and devices
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References (12)
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1. Spear · Solid State Commun. · 1975 · 17 · 119310.1016/0038-1098(75)90284-7 ↗
2. Le Comber · J. Non-Cryst. Solids · 1980 · 35&36 · 32710.1016/0022-3093(80)90615-8 ↗
3. Beyer · Appl. Phys. Lett. · 1977 · 31 · 85010.1063/1.89573 ↗
4. Beyer · Appl. Phys. Lett. · 1979 · 35 · 53910.1063/1.91201 ↗
5. Beyer · J. Non-Cryst. Solids · 1980 · 35&36 · 32110.1016/0022-3093(80)90614-6 ↗
6. Beyer · Solid State Commun. · 1979 · 29 · 29110.1016/0038-1098(79)91059-7 ↗
7. Van Dong · J. Non-Cryst. Solids · 1980 · 35&36 · 35110.1016/0022-3093(80)90619-5 ↗
8. Anderson · Philos. Mag. · 1982 · B45 · 110.1080/13642818208246385 ↗
9. Zimmer · J. Electron. Mater. · 1979 · 8 · 4710.1007/BF02655640 ↗
10. Allan · 1977 · 323
11. Electronic Processes in Non-Crystalline Materials
12. Yamaguchi · J. Non-Cryst. Solids · 1985 · 77&78 · 53510.1016/0022-3093(85)90716-1 ↗