Microstructure and properties of CVD silicon nitride films
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · GaN-based semiconductor devices and materials · Metal and Thin Film Mechanics
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References (6)
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1. Bean · J. Electrochem. Soc. · 1967 · 114 · 73310.1149/1.2426719 ↗
2. Chu · J. Electrochem. Soc. · 1967 · 114 · 71710.1149/1.2426715 ↗
3. Dalton · J. Electrochem. Soc. · 1968 · 115 · 86510.1149/1.2411450 ↗
4. Doo · J. Electrochem. Soc. · 1968 · 115 · 6110.1149/1.2411006 ↗
5. Kendall · Canadian J. Phys. · 1968 · 46 · 250910.1139/p68-611 ↗
6. Gebhardt · J. Electrochem. Soc. · 1976 · 123 · 157810.1149/1.2132642 ↗