Photoluminescence spectroscopy of direct bonded silica based wafers
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Abstract
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Research context
OpenAlex topics: 3D IC and TSV technologies · Thin-Film Transistor Technologies · Photonic and Optical Devices
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References (8)
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4. Tong · IEEE J. Microelectrochem. Syst. · 1994 · 3 · 2910.1109/84.285720 ↗
5. Pelissier · Entropie · 1995 · 192&193 · 59
6. Iler · 1979
7. Lasky · Appl. Phys. Lett. · 1986 · 48 · 7810.1063/1.96768 ↗
8. Magne · 1993 · 329