Preparation of a-Si: H by cross homogeneous cvd method
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Semiconductor materials and interfaces
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References (4)
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1. Scott · Appl. Phys. Lett. · 1981 · 39 · 7310.1063/1.92521 ↗
2. Mayerson · J. Appl. Phys. · 1983 · 54 · 146110.1063/1.332172 ↗
3. Scott · Appl. Phys. Lett. · 1982 · 40 · 97310.1063/1.92972 ↗
4. Kanicki · J. Non-Cryst. Sol. · 1985 · 77–78 · 78910.1016/0022-3093(85)90778-1 ↗