Growth process and structural disorder of reactively-sputtered a-Si:H/a-SiNx multilayer films
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (6)
Show source-provided references
1. Tanaka · Mat. Sci. Reports · 1987 · 2 · 13910.1016/S0920-2307(87)80003-8 ↗
2. Matsuda · J. Non-Cryst. Solids · 1983 · 59–60 · 76710.1016/0022-3093(83)90284-3 ↗
3. Matsuda · J. Non-Cryst. Solids · 1987 · 97–98 · 136710.1016/0022-3093(87)90328-0 ↗
4. I. Honma, H. Kamiyama and K. Tanaka, J. Appl. Phys., in press.
5. Lannin · Physics Today · 1988 · 41 · 2810.1063/1.881123 ↗
6. Maley · J. Non-Cryst. Solids · 1983 · 59–60 · 20110.1016/0022-3093(83)90556-2 ↗